EP 2635884 A1 20130911 - MICROELECTROMECHANICAL SENSOR FOR MEASURING A FORCE, AND CORRESPONDING METHOD
Title (en)
MICROELECTROMECHANICAL SENSOR FOR MEASURING A FORCE, AND CORRESPONDING METHOD
Title (de)
MIKROELEKTROMECHANISCHER SENSOR ZUR MESSUNG EINER KRAFT SOWIE ENTSPRECHENDES VERFAHREN
Title (fr)
MICROCAPTEUR ÉLECTROMÉCANIQUE POUR LA MESURE D'UNE FORCE ET PROCÉDÉ CORRESPONDANT
Publication
Application
Priority
- DE 102010043277 A 20101103
- EP 2011066393 W 20110921
Abstract (en)
[origin: WO2012059266A1] The invention relates to a microelectromechanical sensor for measuring a force, a pressure, or the like. The sensor comprises a substrate with a measuring element. The measuring element comprises at least two electrically conductive regions, at least one of the electrically conductive regions being at least partly connected to the substrate. The sensor also comprises at least one changing region, said changing region lying at least partly between the electrically conductive regions. The changing region is designed in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in the loaded state. The invention likewise relates to a corresponding method and to a corresponding method for producing a microelectromechanical sensor.
IPC 8 full level
G01L 1/00 (2006.01); G01L 7/08 (2006.01); G01L 9/00 (2006.01); G01P 15/08 (2006.01)
CPC (source: EP US)
B81B 3/0018 (2013.01 - US); B81C 1/00023 (2013.01 - US); G01L 1/00 (2013.01 - US); G01L 1/005 (2013.01 - EP US); G01L 7/082 (2013.01 - US); G01L 9/0041 (2013.01 - EP US); G01P 15/12 (2013.01 - EP US)
Citation (search report)
See references of WO 2012059266A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102010043277 A1 20120503; CN 103180705 A 20130626; EP 2635884 A1 20130911; US 2013319138 A1 20131205; US 9021898 B2 20150505; WO 2012059266 A1 20120510
DOCDB simple family (application)
DE 102010043277 A 20101103; CN 201180052871 A 20110921; EP 11769813 A 20110921; EP 2011066393 W 20110921; US 201113882767 A 20110921