EP 2638182 A1 20130918 - APPARATUS AND METHOD FOR SURFACE PROCESSING
Title (en)
APPARATUS AND METHOD FOR SURFACE PROCESSING
Title (de)
VORRICHTUNG UND VERFAHREN ZUR OBERFLÄCHENBEARBEITUNG
Title (fr)
APPAREIL ET PROCÉDÉ POUR LE TRAITEMENT DE SURFACE
Publication
Application
Priority
EP 2010067301 W 20101111
Abstract (en)
[origin: WO2012062369A1] An apparatus for coating parts, comprising a deposition chamber (1) and a plurality of coating equipments (2, 3) for simultaneously or successively providing coating materials to said deposition chamber, wherein at least one of said coating equipment (2) is a metal filtered arc ion source, wherein at least one other of said coating equipment (3) is a laser ablation source, At least two of said coating equipments are removably connected to said deposition chamber via connecting flanges (10). At least two of said flanges are identical, so that one said coating equipment (2, 3) can be connected via different flanges to said deposition chamber.
IPC 8 full level
C23C 14/32 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
C23C 14/28 (2013.01); C23C 14/325 (2013.01); C23C 14/56 (2013.01); C23C 16/54 (2013.01); H01J 37/32055 (2013.01); H01J 37/32807 (2013.01); H01J 37/32889 (2013.01); H01J 37/32899 (2013.01); H01J 37/3405 (2013.01); H01J 2237/332 (2013.01)
Citation (search report)
See references of WO 2012062369A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012062369 A1 20120518; CN 103459652 A 20131218; EP 2638182 A1 20130918; RU 2013126583 A 20141220; TW 201233830 A 20120816
DOCDB simple family (application)
EP 2010067301 W 20101111; CN 201080071083 A 20101111; EP 10778640 A 20101111; RU 2013126583 A 20101111; TW 100140813 A 20111109