EP 2638567 A2 20130918 - METHOD FOR LOADING AND UNLOADING A CASSETTE
Title (en)
METHOD FOR LOADING AND UNLOADING A CASSETTE
Title (de)
BELADE- UND ENTLADEVERFAHREN FÜR EINE PROZESSKASSETTE
Title (fr)
PROCÉDÉ DE CHARGEMENT ET DE DÉCHARGEMENT D'UNE CASSETTE DE PROCESSUS
Publication
Application
Priority
- DE 102010050918 A 20101111
- DE 2011001977 W 20111111
Abstract (en)
[origin: WO2012062288A2] The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma-coating processes, wherein the following method steps are carried out: a. supplying a cassette (1) which can be dismantled and assembled by means of a dismantling and assembling robot, b. automatically dismantling the cassette such that the floors (2) of the cassette are present in a separated state, c. feeding and assigning the floors (2) to at least one fitting machine, which fits the floors (2) with workpieces which are to be processed, d. assembling the fitted floors (2) to form the cassette (1), e. feeding the cassette (1) to the location at which the process is to be carried out, f. carrying out the process, g. feeding the cassette (1) to the dismantling and assembling robot or a further dismantling and assembling robot, h. dismantling the cassette such that the floors (2) of the cassette are present in a separated state, and i. automatically removing the processed workpieces.
IPC 8 full level
H01L 21/677 (2006.01)
CPC (source: EP KR US)
B05B 5/082 (2013.01 - KR US); C23C 16/458 (2013.01 - KR US); H01L 21/6723 (2013.01 - KR); H01L 21/6773 (2013.01 - KR); H01L 21/67772 (2013.01 - EP KR US); Y10T 29/49815 (2015.01 - EP US)
Citation (search report)
See references of WO 2012062288A2
Citation (examination)
- US 2006245871 A1 20061102 - LO WEN-MING [TW], et al
- US 2002014390 A1 20020207 - SHINOZUKA MASAMITSU [JP]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012062288 A2 20120518; WO 2012062288 A3 20120823; CN 103283012 A 20130904; DE 102011118276 A1 20120823; EP 2638567 A2 20130918; JP 2014503989 A 20140213; KR 20130117809 A 20131028; US 2014041186 A1 20140213
DOCDB simple family (application)
DE 2011001977 W 20111111; CN 201180064756 A 20111111; DE 102011118276 A 20111111; EP 11833588 A 20111111; JP 2013538066 A 20111111; KR 20137014861 A 20111111; US 201113884779 A 20111111