EP 2641268 A4 20170125 - POLISHING PAD COMPRISING TRANSMISSIVE REGION
Title (en)
POLISHING PAD COMPRISING TRANSMISSIVE REGION
Title (de)
POLIERKISSEN MIT EINEM ÜBERGANGSBEREICH
Title (fr)
TAMPON À POLIR COMPRENANT UNE RÉGION TRANSMISSIVE
Publication
Application
Priority
- US 41501510 P 20101118
- US 2011061312 W 20111118
Abstract (en)
[origin: WO2012068428A2] The invention provides a polishing pad comprising an optically transrnissive region, wherein the polishing pad comprises a polisbing pad body comprising an opaque first region and an optically transmissive second region, wherein the second region has at least one recess formed therein of at least one part of the polishrag pad body, and at least one translucent window insert is integrated into the at least one recessed area. The polish ing pad body and the at ieast one translucent window insert comprise different porous.materials.
IPC 8 full level
B24B 37/20 (2012.01)
CPC (source: EP KR US)
B24B 37/205 (2013.01 - EP US); B24D 11/001 (2013.01 - US); H01L 21/304 (2013.01 - KR)
Citation (search report)
- [XDA] US 6840843 B2 20050111 - JONES JEREMY [US], et al
- [XI] US 2003129931 A1 20030710 - KONNO TOMOHISA [JP], et al
- See references of WO 2012068428A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012068428 A2 20120524; WO 2012068428 A3 20120816; CN 103222034 A 20130724; CN 103222034 B 20160309; EP 2641268 A2 20130925; EP 2641268 A4 20170125; JP 2013542863 A 20131128; JP 5918254 B2 20160518; KR 101602544 B1 20160310; KR 20130116892 A 20131024; MY 166716 A 20180718; SG 190249 A1 20130628; US 2013237136 A1 20130912
DOCDB simple family (application)
US 2011061312 W 20111118; CN 201180055788 A 20111118; EP 11841143 A 20111118; JP 2013540037 A 20111118; KR 20137015580 A 20111118; MY PI2013001771 A 20111118; SG 2013036363 A 20111118; US 201113988144 A 20111118