EP 2644900 B1 20171227 - Pump system for evacuating of gas from a plurality of chambers and method for controlling the pump system
Title (en)
Pump system for evacuating of gas from a plurality of chambers and method for controlling the pump system
Title (de)
Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems
Title (fr)
Système de pompe destiné à évacuer du gaz depuis plusieurs compartiments ainsi que le procédé de commande du système de pompe
Publication
Application
Priority
- DE 102012102761 A 20120330
- DE 102012105951 A 20120704
Abstract (en)
[origin: EP2644900A2] The pumping system comprises turbomolecular pump (3,4) and two fore-vacuum pumps (5,6). A connection conduit (8) is extended between the two fore-vacuum pumps. A cross-section constriction portion (9) is provided for reducing and regulating of flow of gas. The cross-section constriction portion is formed as one of throttle orifice, throttle valve, and gas flow controller. A regular or switched valve is provided in cross-section constriction portion. An independent claim is included for method for controlling pumping system.
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/00 (2006.01)
CPC (source: EP US)
F04B 23/08 (2013.01 - US); F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 25/16 (2013.01 - EP US); F04D 27/009 (2013.01 - US); F04D 27/0253 (2013.01 - EP US); F04D 27/0269 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2644900 A2 20131002; EP 2644900 A3 20150819; EP 2644900 B1 20171227; DE 102012105951 A1 20131002; JP 2013213498 A 20131017; JP 5695690 B2 20150408; US 2013259711 A1 20131003
DOCDB simple family (application)
EP 13156718 A 20130226; DE 102012105951 A 20120704; JP 2013066397 A 20130327; US 201313851641 A 20130327