EP 2652774 A4 20160427 - APPARATUS AND METHODS FOR UNIFORMLY FORMING POROUS SEMICONDUCTOR ON A SUBSTRATE
Title (en)
APPARATUS AND METHODS FOR UNIFORMLY FORMING POROUS SEMICONDUCTOR ON A SUBSTRATE
Title (de)
VORRICHTUNG UND VERFAHREN ZUR GLEICHMÄSSIGEN HERSTELLUNG PORÖSER HALBLEITER AUF EINEM SUBSTRAT
Title (fr)
APPAREIL ET PROCÉDÉS POUR FORMER UNIFORMÉMENT UN SEMI-CONDUCTEUR POREUX SUR UN SUBSTRAT
Publication
Application
Priority
- US 40994010 P 20101103
- US 201113244466 A 20110924
- US 2011059177 W 20111103
Abstract (en)
[origin: WO2013126033A2] This disclosure enables high-productivity controlled fabrication of uniform porous semiconductor layers (made of single layer or multi-layer porous semiconductors such as porous silicon, comprising single porosity or multi-porosity layers). Some applications include fabrication of MEMS separation and sacrificial layers for die detachment and MEMS device fabrication, membrane formation and shallow trench isolation (STI) porous silicon (using porous silicon formation with an optimal porosity and its subsequent oxidation). Further, this disclosure is applicable to the general fields of photovoltaics, MEMS, including sensors and actuators, stand-alone, or integrated with integrated semiconductor microelectronics, semiconductor microelectronics chips and optoelectronics.
IPC 8 full level
H01L 21/306 (2006.01); C25F 3/12 (2006.01); C25F 7/00 (2006.01); H01L 21/02 (2006.01)
CPC (source: EP KR)
B81C 99/0025 (2013.01 - EP); C25D 11/005 (2013.01 - EP); C25D 11/32 (2013.01 - EP); C25D 17/001 (2013.01 - EP); C25D 17/06 (2013.01 - EP); C25F 3/12 (2013.01 - EP); C25F 7/00 (2013.01 - EP); H01L 21/306 (2013.01 - EP KR); H01L 21/3063 (2013.01 - KR); H01L 31/0284 (2013.01 - EP); H01L 31/18 (2013.01 - EP); B81C 2201/0115 (2013.01 - EP)
Citation (search report)
- [YA] US 6197654 B1 20010306 - SWANSON LELAND S [US]
- [Y] EP 0597428 A1 19940518 - CANON KK [JP]
- [A] WO 2010083422 A1 20100722 - SOLEXEL INC, et al
- See references of WO 2013126033A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013126033 A2 20130829; WO 2013126033 A3 20131017; EP 2652774 A2 20131023; EP 2652774 A4 20160427; EP 2652774 B1 20171011; KR 20140061287 A 20140521
DOCDB simple family (application)
US 2011059177 W 20111103; EP 11876396 A 20111103; KR 20137014255 A 20111103