EP 2656961 A1 20131030 - METHOD FOR MANUFACTURING SUBSTRATE HAVING MICROPORE, AND SUBSTRATE
Title (en)
METHOD FOR MANUFACTURING SUBSTRATE HAVING MICROPORE, AND SUBSTRATE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES SUBSTRATS MIT MIKROPOREN UND SUBSTRAT
Title (fr)
PROCÉDÉ DE FABRICATION D'UN SUBSTRAT AYANT DES MICROPORES ET SUBSTRAT
Publication
Application
Priority
- JP 2011024998 A 20110208
- JP 2012052255 W 20120201
Abstract (en)
A method of manufacturing a base body having a microscopic hole, includes: forming at least one of a first modified region and a second modified region by scanning inside of a base body with a focal point of a first laser light having a pulse duration on order of picoseconds or less; forming a periodic modified group formed of a plurality of third modified regions and fourth modified regions by scanning an inside of the base body with a focal point of a second laser light having a pulse duration on order of picoseconds or less; obtaining the base body which is formed so that the first modified region and the second modified region overlap or come into contact with the modified group; and forming a microscopic hole by removing the first modified region and the third modified regions by etching.
IPC 8 full level
B23K 26/00 (2006.01); B23K 26/04 (2006.01); B23K 26/36 (2006.01); B23K 26/40 (2006.01); B81C 99/00 (2010.01); C03C 15/00 (2006.01); C03C 23/00 (2006.01)
CPC (source: EP US)
B23K 26/50 (2015.10 - EP US); B32B 3/266 (2013.01 - US); B81C 1/00507 (2013.01 - EP US); B81C 1/00547 (2013.01 - US); C03C 15/00 (2013.01 - EP US); C03C 23/0025 (2013.01 - EP US); B81B 2201/0214 (2013.01 - EP US); B81B 2201/058 (2013.01 - EP US); B81B 2203/0353 (2013.01 - EP US); B81C 2201/013 (2013.01 - US); B81C 2201/0143 (2013.01 - US); Y10T 428/24273 (2015.01 - EP US)
Citation (search report)
See references of WO 2012108316A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2656961 A1 20131030; JP 5906198 B2 20160420; JP WO2012108316 A1 20140703; US 2013309445 A1 20131121; US 2014326702 A1 20141106; WO 2012108316 A1 20120816
DOCDB simple family (application)
EP 12744669 A 20120201; JP 2012052255 W 20120201; JP 2012556843 A 20120201; US 201313952141 A 20130726; US 201414331957 A 20140715