EP 2659521 A2 20131106 - A METHOD AND APPARATUS FOR FORMING A THIN LAMINA
Title (en)
A METHOD AND APPARATUS FOR FORMING A THIN LAMINA
Title (de)
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINER DÜNNSCHICHT
Title (fr)
PROCÉDÉ ET APPAREIL DE FORMATION D'UNE FINE LAMINA
Publication
Application
Priority
- US 98042410 A 20101229
- US 201161510477 P 20110721
- US 201161510476 P 20110721
- US 201161510478 P 20110721
- US 201161510475 P 20110721
- US 2011066195 W 20111220
Abstract (en)
[origin: WO2012092026A2] A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.
IPC 8 full level
H01L 31/18 (2006.01); H01L 21/265 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/762 (2006.01); H01L 31/0224 (2006.01); H01L 31/042 (2014.01); H01L 31/056 (2014.01)
CPC (source: EP KR)
H01L 21/265 (2013.01 - KR); H01L 21/67 (2013.01 - KR); H01L 21/67092 (2013.01 - EP); H01L 21/67132 (2013.01 - EP); H01L 21/6838 (2013.01 - EP); H01L 21/76254 (2013.01 - EP); H01L 31/022466 (2013.01 - EP); H01L 31/042 (2013.01 - KR); H01L 31/056 (2014.12 - EP); H01L 31/18 (2013.01 - KR); H01L 31/1804 (2013.01 - EP); Y02E 10/52 (2013.01 - EP); Y02E 10/547 (2013.01 - EP); Y02P 70/50 (2015.11 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012092026 A2 20120705; WO 2012092026 A3 20121011; CN 103370800 A 20131023; EP 2659521 A2 20131106; EP 2659521 A4 20150513; JP 2014506008 A 20140306; KR 20140004120 A 20140110; TW 201246301 A 20121116; TW I552205 B 20161001
DOCDB simple family (application)
US 2011066195 W 20111220; CN 201180062986 A 20111220; EP 11854117 A 20111220; JP 2013547546 A 20111220; KR 20137017692 A 20111220; TW 100149202 A 20111228