EP 2670877 A1 20131211 - SEPARATING DEVICE AND METHOD FOR PRODUCING A CRUCIBLE FOR SAID SEPARATING DEVICE
Title (en)
SEPARATING DEVICE AND METHOD FOR PRODUCING A CRUCIBLE FOR SAID SEPARATING DEVICE
Title (de)
ABSCHEIDEVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINES TIEGELS HIERFÜR
Title (fr)
DISPOSITIF DE SÉPARATION ET PROCÉDÉ DE FABRICATION D'UN CREUSET ASSOCIÉ
Publication
Application
Priority
- DE 102011000502 A 20110204
- DE 2012100020 W 20120131
Abstract (en)
[origin: WO2012103885A1] The invention relates to a separating device, comprising a crucible (1) and heating means (2) that are arranged to heat up evaporation material (3) in the crucible (1), wherein the crucible (1) comprises a metal body (11) and a protective layer (13) that contains titanium oxide (TixOy) and covers at least a part of the inner surface (12) of the metal body (11). The invention further relates to a method for producing a crucible (1) for such a separating device.
IPC 8 full level
C23C 8/10 (2006.01); C23C 14/06 (2006.01); C23C 14/24 (2006.01); C23F 1/18 (2006.01)
CPC (source: EP KR US)
C23C 8/10 (2013.01 - EP US); C23C 14/06 (2013.01 - EP US); C23C 14/0623 (2013.01 - EP US); C23C 14/08 (2013.01 - KR); C23C 14/24 (2013.01 - KR); C23C 14/243 (2013.01 - EP US); C23C 16/448 (2013.01 - US); H01L 31/18 (2013.01 - US); H01L 31/182 (2013.01 - EP US); Y02E 10/546 (2013.01 - EP US); Y02P 70/50 (2015.11 - EP US); Y10T 29/49986 (2015.01 - EP US)
Citation (search report)
See references of WO 2012103885A1
Citation (examination)
- ASHRAFIZADEH A ET AL: "Structural features and corrosion analysis of thermally oxidized titanium", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 480, no. 2, 8 July 2009 (2009-07-08), pages 849 - 852, XP026169538, ISSN: 0925-8388, [retrieved on 20090304], DOI: 10.1016/J.JALLCOM.2009.02.079
- KUMAR S ET AL: "Thermal oxidation of CP-Ti: Evaluation of characteristics and corrosion resistance as a function of treatment time", MATERIALS SCIENCE AND ENGINEERING C, ELSEVIER SCIENCE S.A, CH, vol. 29, no. 6, 1 August 2009 (2009-08-01), pages 1942 - 1949, XP026322583, ISSN: 0928-4931, [retrieved on 20090313], DOI: 10.1016/J.MSEC.2009.03.007
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011000502 A1 20120809; CN 103459650 A 20131218; EP 2670877 A1 20131211; JP 2014508860 A 20140410; JP 6050255 B2 20161221; KR 20130110211 A 20131008; TW 201233831 A 20120816; TW I576447 B 20170401; US 2014026815 A1 20140130; WO 2012103885 A1 20120809; WO 2012103885 A4 20121018
DOCDB simple family (application)
DE 102011000502 A 20110204; CN 201280007567 A 20120131; DE 2012100020 W 20120131; EP 12713863 A 20120131; JP 2013552106 A 20120131; KR 20137019831 A 20120131; TW 101102796 A 20120130; US 201213982985 A 20120131