EP 2678462 B1 20170726 - COATING APPARATUS AND METHOD.
Title (en)
COATING APPARATUS AND METHOD.
Title (de)
VERFAHREN UND VORRICHTUNG ZUR BESCHICHTUNG.
Title (fr)
DISPOSITIF ET PROCÉDÉ D'ENDUCTION .
Publication
Application
Priority
- EP 11155238 A 20110221
- EP 2012052935 W 20120221
- EP 12706232 A 20120221
Abstract (en)
[origin: EP2489759A1] A substrate processing system for processing an essentially vertically- oriented substrate, comprising: a first deposition chamber (101) having a first processing region and being adapted to deposit a first layer comprising a first material; a second deposition chamber (102) having a second processing region and being adapted to deposit a second layer over the first layer, the second layer comprising a second material; a third deposition chamber (103) having a third processing region and being adapted to deposit a layer comprising the second material; a transfer chamber (111) providing essentially linear transport paths with the first, the second, and the third deposition chambers, respectively; and a further chamber (121) comprising a first and a second transportation track (163,164), wherein at least one of the first and second transportation tracks forms an essentially linear transportation path with the first processing chamber, wherein the first deposition chamber (101) is adapted to receive the substrate from the transfer chamber, and to deposit a further layer comprising the first material.
IPC 8 full level
B05C 13/00 (2006.01); B05D 7/00 (2006.01); C03C 17/00 (2006.01); C23C 14/56 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR US)
B05C 13/00 (2013.01 - US); B05D 7/56 (2013.01 - US); C23C 14/185 (2013.01 - KR); C23C 14/568 (2013.01 - EP KR US); H01L 21/67173 (2013.01 - EP US); H01L 21/67712 (2013.01 - EP US); H01L 21/6776 (2013.01 - EP US); B05C 13/00 (2013.01 - KR); C23C 14/34 (2013.01 - KR)
Citation (examination)
JP 2007039157 A 20070215 - ULVAC CORP
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2489759 A1 20120822; EP 2489759 B1 20141210; CN 102803551 A 20121128; CN 102803551 B 20160316; EP 2678462 A1 20140101; EP 2678462 B1 20170726; JP 2014507565 A 20140327; JP 5945553 B2 20160705; KR 102095717 B1 20200401; KR 20140015372 A 20140206; KR 20190053293 A 20190517; TW 201248760 A 20121201; TW I579952 B 20170421; US 2012213938 A1 20120823; US 2014044880 A1 20140213; US 9211563 B2 20151215; WO 2012113792 A1 20120830
DOCDB simple family (application)
EP 11155238 A 20110221; CN 201280000407 A 20120221; EP 12706232 A 20120221; EP 2012052935 W 20120221; JP 2013553970 A 20120221; KR 20137024539 A 20120221; KR 20197013377 A 20120221; TW 101105674 A 20120221; US 201113036265 A 20110228; US 201214000369 A 20120221