EP 2686371 A1 20140122 - METHOD FOR MODIFYING A SURFACE OF A SUBSTRATE USING ION BOMBARDMENT
Title (en)
METHOD FOR MODIFYING A SURFACE OF A SUBSTRATE USING ION BOMBARDMENT
Title (de)
VERFAHREN ZUR MODIFIZIERUNG EINER OBERFLÄCHE EINES SUBSTRATS DURCH IONENBESCHUSS
Title (fr)
PROCÉDÉ DE MODIFICATION D'UNE SURFACE D'UN SUBSTRAT PAR BOMBARDEMENT IONIQUE
Publication
Application
Priority
- DE 102011013822 A 20110314
- EP 2012054480 W 20120314
Abstract (en)
[origin: WO2012123503A1] The invention relates to a method for modifying a surface of a substrate (6) using ion bombardment, in which the ions (7) are produced in a process gas (10) by a glow discharge supported by a magnetic field, said glow discharge being produced by means of a magnetron (8, 9) that has an electrode (1) and at least one magnet (3) for producing the magnetic field (4). The process gas (10) has at least one electronegative component such that negative ions (7) are produced during said glow discharge supported by a magnetic field, said negative ions (7), which are produced on the surface of the electrode (1), being accelerated in the direction of the substrate (6) by an electrical voltage applied to the electrode (1). The negative ions (7) striking the substrate (6) cause the surface of the substrate (6) to be modified, and a surface structure (15) is produced which extends at least 50 nm deep into said substrate (6).
IPC 8 full level
C08J 7/12 (2006.01); B29C 59/14 (2006.01)
CPC (source: EP KR US)
B29C 59/14 (2013.01 - EP KR US); C08J 7/12 (2013.01 - KR); C08J 7/123 (2013.01 - EP US); C08J 7/18 (2013.01 - KR); C23C 14/48 (2013.01 - US); H01J 37/3402 (2013.01 - EP US); H01J 37/3405 (2013.01 - US)
Citation (search report)
See references of WO 2012123503A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011013822 A1 20120920; CN 103703061 A 20140402; CN 103703061 B 20150819; EP 2686371 A1 20140122; EP 2686371 B1 20181121; JP 2014510811 A 20140501; JP 5837624 B2 20151224; KR 101907526 B1 20181012; KR 20140038952 A 20140331; US 2014072721 A1 20140313; WO 2012123503 A1 20120920
DOCDB simple family (application)
DE 102011013822 A 20110314; CN 201280023271 A 20120314; EP 12712238 A 20120314; EP 2012054480 W 20120314; JP 2013558422 A 20120314; KR 20137026767 A 20120314; US 201214005239 A 20120314