EP 2699706 A1 20140226 - METHOD FOR DEPOSITING A TRANSPARENT BARRIER LAYER SYSTEM
Title (en)
METHOD FOR DEPOSITING A TRANSPARENT BARRIER LAYER SYSTEM
Title (de)
VERFAHREN ZUM ABSCHEIDEN EINES TRANSPARENTEN BARRIERESCHICHTSYSTEMS
Title (fr)
PROCÉDÉ DE DÉPÔT D'UN SYSTÈME DE COUCHES BARRIÈRE TRANSPARENTES
Publication
Application
Priority
- DE 102011017403 A 20110418
- EP 2012052624 W 20120215
Abstract (en)
[origin: WO2012143150A1] The invention relates to a method for producing a transparent barrier layer system, wherein in a vacuum chamber at least two transparent barrier layers and a transparent intermediate layer disposed between the two barrier layers are deposited on a transparent plastic film, wherein for deposition of the barrier layers aluminium is vaporised and simultaneously at least one first reactive gas is introduced into the vacuum chamber and wherein for deposition of the intermediate layer aluminium is vaporised and simultaneously at least one second reactive gas is introduced into the vacuum chamber, and a silicon-containing layer is deposited as intermediate layer by means of a PECVD process.
IPC 8 full level
C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 16/18 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/50 (2006.01)
CPC (source: EP US)
C23C 14/0021 (2013.01 - EP US); C23C 14/081 (2013.01 - EP US); C23C 16/18 (2013.01 - EP US); C23C 16/34 (2013.01 - US); C23C 16/345 (2013.01 - EP US); C23C 16/40 (2013.01 - US); C23C 16/401 (2013.01 - EP US); C23C 16/50 (2013.01 - EP US); C23C 16/511 (2013.01 - US); C23C 28/42 (2013.01 - EP US)
Citation (search report)
See references of WO 2012143150A1
Citation (examination)
- JP 2005178137 A 20050707 - DAINIPPON PRINTING CO LTD
- JP S6173881 A 19860416 - FUJI ELECTRIC CO LTD
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011017403 A1 20121018; EP 2699706 A1 20140226; JP 2014517144 A 20140717; JP 5930341 B2 20160608; MX 2013008809 A 20131003; RU 2013136544 A 20150210; RU 2583196 C2 20160510; US 2013287969 A1 20131031; WO 2012143150 A1 20121026
DOCDB simple family (application)
DE 102011017403 A 20110418; EP 12706511 A 20120215; EP 2012052624 W 20120215; JP 2014505546 A 20120215; MX 2013008809 A 20120215; RU 2013136544 A 20120215; US 201213980245 A 20120215