EP 2699707 A1 20140226 - PROCESS FOR PRODUCING A POLYCRYSTALLINE LAYER
Title (en)
PROCESS FOR PRODUCING A POLYCRYSTALLINE LAYER
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER POLYKRISTALLINEN SCHICHT
Title (fr)
PROCÉDÉ DE PRODUCTION D'UNE COUCHE POLYCRISTALLINE
Publication
Application
Priority
- DE 102011002236 A 20110421
- EP 2012054623 W 20120316
Abstract (en)
[origin: WO2012143186A1] The present invention relates to a process for producing a polycrystalline layer. This process comprises the steps of applying a layer sequence, comprising at least one amorphous starting layer provided with impurities, a metallic activator layer and a cleaning layer based on titanium or titanium oxide arranged between the starting layer and the activator layer for withdrawing the impurities from the starting layer, to a substrate; and carrying out a heat treatment after the layer sequence has been applied for forming a polycrystalline end layer.
IPC 8 full level
C23C 14/14 (2006.01); C23C 14/58 (2006.01)
CPC (source: EP US)
C23C 14/14 (2013.01 - EP US); C23C 14/5806 (2013.01 - EP US); H01L 21/02422 (2013.01 - EP US); H01L 21/02491 (2013.01 - EP US); H01L 21/02532 (2013.01 - EP US); H01L 21/02595 (2013.01 - EP US); H01L 21/0262 (2013.01 - US); H01L 21/02664 (2013.01 - EP US); H01L 21/02672 (2013.01 - EP US); H01L 21/2225 (2013.01 - EP US); H01L 31/186 (2013.01 - EP US); Y02E 10/50 (2013.01 - US); Y02P 70/50 (2015.11 - EP US)
Citation (search report)
See references of WO 2012143186A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 202012100085 U1 20120306; CN 103492607 A 20140101; DE 102011002236 A1 20121025; EP 2699707 A1 20140226; US 2014057420 A1 20140227; WO 2012143186 A1 20121026
DOCDB simple family (application)
DE 202012100085 U 20120111; CN 201280019083 A 20120316; DE 102011002236 A 20110421; EP 12711603 A 20120316; EP 2012054623 W 20120316; US 201214113008 A 20120316