EP 2700737 A3 20150527 - Pattern forming device and pattern forming method
Title (en)
Pattern forming device and pattern forming method
Title (de)
Musterbildende Vorrichtung und Verfahren zur Strukturbildung
Title (fr)
Dispositif et procédé de formation de motif
Publication
Application
Priority
JP 2012183261 A 20120822
Abstract (en)
[origin: EP2700737A2] A pattern forming device includes a plurality of tanks, and a power supply device. Each of the tanks has an open end having the same shape as a profile shape of a corresponding one of regions of a surface of a workpiece, in which different types of films are to be formed, and stores a corresponding one of electrodeposition solutions used to form the different types of films in a state where the open end is in contact with the surface. The power supply device applies a predetermined voltage to between the workpiece that serves as a first electrode, and each one of second electrodes in the tanks.
IPC 8 full level
C25D 5/02 (2006.01); C25D 13/22 (2006.01); C25D 17/00 (2006.01); C25D 17/02 (2006.01); C25D 17/12 (2006.01)
CPC (source: EP US)
C25D 5/02 (2013.01 - EP US); C25D 13/22 (2013.01 - EP US); C25D 17/00 (2013.01 - EP US); C25D 17/02 (2013.01 - EP US); C25D 17/12 (2013.01 - EP US); C25D 17/004 (2013.01 - EP US)
Citation (search report)
- [XI] US 2007029189 A1 20070208 - ZACH MICHAEL P [US]
- [XI] US 2003070917 A1 20030417 - GIAQUINTA DANIEL M [US], et al
- [XI] US 4315809 A 19820216 - PHILLIPS JAMES G
- [XI] US 4348267 A 19820907 - SHIMAMURA KOUICHI
- [A] US 2004168925 A1 20040902 - LANDAU UZIEL [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2700737 A2 20140226; EP 2700737 A3 20150527; CN 103628103 A 20140312; JP 2014040633 A 20140306; US 2014054176 A1 20140227
DOCDB simple family (application)
EP 13181003 A 20130820; CN 201310361890 A 20130819; JP 2012183261 A 20120822; US 201313957865 A 20130802