EP 2701185 B1 20171108 - METHOD OF TRANSFERRING AN InP FILM
Title (en)
METHOD OF TRANSFERRING AN InP FILM
Title (de)
VERFAHREN ZUR ÜBERTRAGUNG EINER InP-SCHICHT
Title (fr)
PROCÉDÉ DE TRANSFERT D'UN FILM D'InP
Publication
Application
Priority
FR 1257969 A 20120823
Abstract (en)
[origin: EP2701185A1] The method involves providing a structure comprising a surface layer of indium phosphide and an underlying doped thin indium phosphide layer (4). Hydrogen ions are implanted through the surface layer so as to create a weakened plane (7) in the doped thin layer for delimiting a film comprising the surface layer. The surface layer is placed in close contact with a stiffener substrate (9). Heat treatment is applied to obtain splitting at the weakened plane, and the film is transferred onto the stiffener substrate. The surface layer is doped with a dopant same as that of the doped thin layer.
IPC 8 full level
H01L 21/265 (2006.01); H01L 21/762 (2006.01)
CPC (source: CN EP KR US)
H01L 21/20 (2013.01 - KR); H01L 21/2654 (2013.01 - US); H01L 21/76254 (2013.01 - CN EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2701185 A1 20140226; EP 2701185 B1 20171108; CN 103632924 A 20140312; CN 103632924 B 20171020; FR 2994766 A1 20140228; FR 2994766 B1 20140905; JP 2014042031 A 20140306; JP 6250979 B2 20171220; KR 20140026262 A 20140305; SG 2013057799 A 20140328; TW 201415539 A 20140416; TW I626679 B 20180611; US 2014057423 A1 20140227; US 9123641 B2 20150901
DOCDB simple family (application)
EP 13177241 A 20130719; CN 201310364487 A 20130820; FR 1257969 A 20120823; JP 2013173957 A 20130823; KR 20130095924 A 20130813; SG 2013057799 A 20130730; TW 102129789 A 20130820; US 201313974347 A 20130823