EP 2702608 A1 20140305 - SUBSTRATE TREATMENT INSTALLATION
Title (en)
SUBSTRATE TREATMENT INSTALLATION
Title (de)
SUBSTRATBEHANDLUNGSANLAGE
Title (fr)
INSTALLATION DE TRAITEMENT DE SUBSTRATS
Publication
Application
Priority
- DE 102011100098 A 20110429
- DE 102011081749 A 20110829
- EP 2012057765 W 20120427
Abstract (en)
[origin: WO2012146715A1] A problem addressed by the invention, namely that of improving known substrate treatment installations such that substrates can be treated by light in said installations, without the need for cost-intensive inspection windows having a large thickness, is solved by means of a substrate treatment installation comprising an installation chamber and a light source for the exposure of substrates to light, the light source being arranged in the interior of the substrate treatment installation and comprising at least one lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating a lamp, and also comprising at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: CN EP US)
H01J 7/26 (2013.01 - US); H01J 37/32522 (2013.01 - US); H01L 21/67115 (2013.01 - CN EP US)
Citation (search report)
See references of WO 2012146715A1
Citation (examination)
US 3733599 A 19730515 - FANTOZZI L
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011081749 A1 20121031; DE 102011081749 B4 20160414; CN 103518257 A 20140115; CN 103518257 B 20160824; EP 2702608 A1 20140305; US 2014070689 A1 20140313; US 9076635 B2 20150707; WO 2012146715 A1 20121101
DOCDB simple family (application)
DE 102011081749 A 20110829; CN 201280021001 A 20120427; EP 12718967 A 20120427; EP 2012057765 W 20120427; US 201214113472 A 20120427