EP 2709949 A1 20140326 - METHOD FOR PRODUCING TRISILYLAMINE IN THE GAS PHASE
Title (en)
METHOD FOR PRODUCING TRISILYLAMINE IN THE GAS PHASE
Title (de)
VERFAHREN ZUR HERSTELLUNG VON TRISILYLAMIN IN DER GASPHASE
Title (fr)
PROCÉDÉ DE PRODUCTION DE TRISILYLAMINE EN PHASE GAZEUSE
Publication
Application
Priority
- DE 102011075974 A 20110517
- EP 2012057634 W 20120426
Abstract (en)
[origin: WO2012156191A1] The invention relates to a method for producing trisilylamine from ammoniac and monochlorosilane in the gas phase. The invention further relates to a plant in which such a method can be performed.
IPC 8 full level
C01B 21/087 (2006.01)
CPC (source: EP KR US)
B01J 19/24 (2013.01 - KR US); B01J 19/245 (2013.01 - US); C01B 21/068 (2013.01 - KR); C01B 21/087 (2013.01 - EP US); B01J 2219/0004 (2013.01 - US); B01J 2219/00051 (2013.01 - US); B01J 2219/24 (2013.01 - US); C07F 7/10 (2013.01 - US)
Citation (search report)
See references of WO 2012156191A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012156191 A1 20121122; CN 103608287 A 20140226; DE 102011075974 A1 20121122; EP 2709949 A1 20140326; JP 2014522366 A 20140904; JP 5847301 B2 20160120; KR 20140035401 A 20140321; TW 201307196 A 20130216; TW I485101 B 20150521; US 2014072497 A1 20140313; US 2015284250 A1 20151008
DOCDB simple family (application)
EP 2012057634 W 20120426; CN 201280023869 A 20120426; DE 102011075974 A 20110517; EP 12719328 A 20120426; JP 2014510715 A 20120426; KR 20137033067 A 20120426; TW 101117100 A 20120514; US 201214117925 A 20120426; US 201514744208 A 20150619