EP 2718666 A1 20140416 - COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS
Title (en)
COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS
Title (de)
GEKOPPELTES KONFOKALES SYSTEM MIT MEHREREN WELLENLÄNGEN FÜR ABSTANDSMESSUNGEN
Title (fr)
SYSTÈMES CONFOCAUX À MULTIPLES LONGUEURS D'ONDE COUPLÉES POUR MESURER DES DISTANCES
Publication
Application
Priority
- US 201113156574 A 20110609
- US 201113156572 A 20110609
- US 2012040166 W 20120531
Abstract (en)
[origin: WO2012170275A1] A system for measuring a distance to a substrate includes a first light source, emitting a first wavelength on a region of the substrate though a lens. A second light source emits a second wavelength region of the substrate through the lens. A first and second detector are configured to detect the first and second wavelength light reflected from the substrate. A processor is configured to compute a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate. A second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate. A ratio response function represents the ratio of the first and second response function as a function of distance between the imaging device and substrate.
IPC 8 full level
G01B 11/14 (2006.01); G02B 21/00 (2006.01)
CPC (source: EP)
G01B 11/14 (2013.01); G02B 21/0064 (2013.01); G01B 2210/50 (2013.01)
Citation (search report)
See references of WO 2012170275A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2012170275 A1 20121213; CN 103620340 A 20140305; EP 2718666 A1 20140416
DOCDB simple family (application)
US 2012040166 W 20120531; CN 201280028199 A 20120531; EP 12731211 A 20120531