EP 2719262 A2 20140416 - METHOD FOR IMPEDANCE MATCHING THE OUTPUT IMPEDANCE OF A HIGH-FREQUENCY POWER SUPPLY ARRANGEMENT TO THE IMPEDANCE OF A PLASMA LOAD, AND HIGH FREQUENCY POWER SUPPLY ARRANGEMENT
Title (en)
METHOD FOR IMPEDANCE MATCHING THE OUTPUT IMPEDANCE OF A HIGH-FREQUENCY POWER SUPPLY ARRANGEMENT TO THE IMPEDANCE OF A PLASMA LOAD, AND HIGH FREQUENCY POWER SUPPLY ARRANGEMENT
Title (de)
VERFAHREN ZUR IMPEDANZANPASSUNG DER AUSGANGSIMPEDANZ EINER HOCHFREQUENZLEISTUNGSVERSORGUNGSANORDNUNG AN DIE IMPEDANZ EINER PLASMALAST UND HOCHFREQUENZLEISTUNGSVERSORGUNGSANORDNUNG
Title (fr)
PROCÉDÉ PERMETTANT D'ADAPTER L'IMPÉDANCE DE SORTIE D'UN ENSEMBLE D'ALIMENTATION EN PUISSANCE À HAUTE FRÉQUENCE À L'IMPÉDANCE D'UNE CHARGE PLASMA ET ENSEMBLE D'ALIMENTATION EN PUISSANCE À HAUTE FRÉQUENCE
Publication
Application
Priority
- DE 102011076404 A 20110524
- DE 2012100142 W 20120516
Abstract (en)
[origin: WO2012159620A2] The invention relates to a method for impedance matching the output impedance of a high-frequency power supply arrangement (1) to the impedance of a plasma load (2), comprising the following method steps: a. generating a high-frequency signal by means of a high-frequency signal generator (6); b. in a first impedance matching mode, impedance matching the output impedance of the high-frequency power supply arrangement (1) exclusively by changing the frequency of the generated high-frequency signal; c. monitoring the frequency of the generated high-frequency signal to ascertain whether said frequency is within a predetermined frequency range; d. if the frequency is outside the predetermined frequency range, in a second impedance matching mode, impedance matching the output impedance of the high-frequency power supply arrangement (1) by mechanically and/or electrically changing a circuit (11) connected downstream of the high-frequency signal generator (6).
IPC 8 full level
H05H 1/46 (2006.01)
CPC (source: EP US)
H01J 37/241 (2013.01 - US); H01J 37/32174 (2013.01 - EP US); H01J 37/32183 (2013.01 - EP US); H03H 7/40 (2013.01 - EP US); H05H 1/46 (2013.01 - EP US); H05H 2242/26 (2021.05 - EP US)
Citation (search report)
See references of WO 2012159620A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011076404 A1 20121129; DE 102011076404 B4 20140626; EP 2719262 A2 20140416; US 2014145636 A1 20140529; US 9111718 B2 20150818; WO 2012159620 A2 20121129; WO 2012159620 A3 20130307
DOCDB simple family (application)
DE 102011076404 A 20110524; DE 2012100142 W 20120516; EP 12753385 A 20120516; US 201314087500 A 20131122