EP 2729789 A4 20150318 - MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
Title (en)
MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
Title (de)
WINKELSPEKTROSKOPELLIPSOMETRIE FÜR MEHRERE ANALYSEGERÄTE
Title (fr)
ELLIPSOMÉTRIE SPECTROSCOPIQUE À MULTIPLES ANGLES D'ANALYSEUR
Publication
Application
Priority
- US 201161505403 P 20110707
- US 201213536605 A 20120628
- US 2012045436 W 20120703
Abstract (en)
[origin: WO2013006637A1] Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.
IPC 8 full level
G01J 4/00 (2006.01); G01N 21/21 (2006.01)
CPC (source: EP)
G01J 4/00 (2013.01); G01N 21/211 (2013.01); G01N 2021/213 (2013.01)
Citation (search report)
- [X] US 5581350 A 19961203 - CHEN XING [US], et al
- [Y] WO 2010049652 A9 20100819 - HORIBA JOBIN YVON SAS [FR], et al
- [Y] US 5333052 A 19940726 - FINAROV MOSHE [IL]
- [A] US 7075650 B1 20060711 - JOHS BLAINE D [US], et al
- [XY] FERRIEU F: "INFRARED SPECTROSCOPIC ELLIPSOMETRY USING A FOURIER TRANSFORM INFRARED SPECTROMETER:SOME APPLICATIONS IN THIN-FILM CHARACTERIZATION", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 60, no. 10, 1 October 1989 (1989-10-01), pages 3212 - 3216, XP000071708, ISSN: 0034-6748, DOI: 10.1063/1.1140554
- See references of WO 2013006637A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013006637 A1 20130110; EP 2729789 A1 20140514; EP 2729789 A4 20150318; JP 2014524028 A 20140918; TW 201314173 A 20130401; TW I558975 B 20161121
DOCDB simple family (application)
US 2012045436 W 20120703; EP 12807285 A 20120703; JP 2014519266 A 20120703; TW 101124514 A 20120706