EP 2732917 A4 20150415 - POLISHING PAD
Title (en)
POLISHING PAD
Title (de)
POLIERKISSEN
Title (fr)
TAMPON DE POLISSAGE
Publication
Application
Priority
- JP 2011156424 A 20110715
- JP 2012067835 W 20120712
Abstract (en)
[origin: EP2732917A1] A polishing pad includes at least a polishing layer including a groove, on a polishing surface, having side surfaces, wherein at least one of the side surfaces includes a first side surface that extends continuously to the polishing surface and forms an angle ± with the polishing surface, and a second side surface that extends continuously to the first side surface and forms an angle ² with a plane parallel to the polishing surface, the angle ± formed with the polishing surface is larger than 95 degrees, the angle ² formed with the plane parallel to the polishing surface is larger than 95 degrees, and the angle ² formed with the plane parallel to the polishing surface is smaller than the angle ± formed with the polishing surface, and a bending point depth from the polishing surface to a bending point between the first side surface and the second side surface is more than 0.2 mm and not more than 3.0 mm.
IPC 8 full level
B24B 37/26 (2012.01)
CPC (source: CN EP US)
B24B 37/16 (2013.01 - EP US); B24B 37/26 (2013.01 - CN EP US); B24D 11/00 (2013.01 - EP US)
Citation (search report)
- [XDI] JP 2003163192 A 20030606 - SHINETSU HANDOTAI KK
- [AD] JP 2004186392 A 20040702 - TOSHIBA CERAMICS CO
- See references of WO 2013011921A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2732917 A1 20140521; EP 2732917 A4 20150415; CN 103648718 A 20140319; JP WO2013011921 A1 20150223; KR 20140039043 A 20140331; TW 201313388 A 20130401; US 2014141704 A1 20140522; WO 2013011921 A1 20130124
DOCDB simple family (application)
EP 12815419 A 20120712; CN 201280034917 A 20120712; JP 2012067835 W 20120712; JP 2012532393 A 20120712; KR 20147000489 A 20120712; TW 101125282 A 20120713; US 201214232851 A 20120712