EP 2745306 A1 20140625 - PLASMA PROCESSING APPARATUS
Title (en)
PLASMA PROCESSING APPARATUS
Title (de)
PLASMAVERARBEITUNGSVORRICHTUNG
Title (fr)
APPAREIL DE TRAITEMENT AU PLASMA
Publication
Application
Priority
GB 2011051548 W 20110816
Abstract (en)
[origin: WO2013024235A1] The present invention relates to an apparatus (10) for plasma processing an article(12), the apparatus comprisingra chamber(14) for receiving an article to be processed; electrode means (16) for generating an electricand/or magneticfield in said chamberwhen energised by alternating electrical energyfor establishing a plasma in said chamber so that said article can be processed; andvarying frequency generatingmeans (20) for generating alternating electrical energy for transmission tothe electrode means, said alternating electrical energy being generated at a plurality of different frequencies in succession, one frequency after another frequency, thereby producing a succession of standing waves in said chamber of a plurality of different wavelengths.
IPC 8 full level
C23C 16/509 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
H01J 37/32082 (2013.01); H01J 37/32165 (2013.01); H01J 37/32376 (2013.01); H01J 2237/3323 (2013.01); H01J 2237/3325 (2013.01)
Citation (search report)
See references of WO 2013024235A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013024235 A1 20130221; CN 104011827 A 20140827; EP 2745306 A1 20140625
DOCDB simple family (application)
GB 2011051548 W 20110816; CN 201180074206 A 20110816; EP 11761395 A 20110816