EP 2747190 B1 20201007 - Capacitive MEMS component with buried transmission line
Title (en)
Capacitive MEMS component with buried transmission line
Title (de)
Kapazitive Mems-Komponente mit Erdübertragungslinie
Title (fr)
Composant mems capacitif à ligne de transmission enterrée
Publication
Application
Priority
FR 1203561 A 20121221
Abstract (en)
[origin: EP2747190A1] The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is planar. The substrate includes a housing (9) in which the transmission line is placed. A passivation layer is located between the substrate and the dielectric layer, where a transverse dimension of the membrane in a direction perpendicular to the longitudinal direction is between 10 and 50 microns. An independent claim is also included for a method for development of a capacitive microelectromechanical system.
IPC 8 full level
H01P 1/12 (2006.01); H01H 59/00 (2006.01)
CPC (source: EP)
H01P 1/127 (2013.01); H01H 59/0009 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2747190 A1 20140625; EP 2747190 B1 20201007; FR 3000049 A1 20140627; FR 3000049 B1 20160115
DOCDB simple family (application)
EP 13198695 A 20131220; FR 1203561 A 20121221