EP 2748349 A1 20140702 - CORNER CUT MASK
Title (en)
CORNER CUT MASK
Title (de)
ECKENSCHNITTMASKE
Title (fr)
MASQUE À COIN COUPÉ
Publication
Application
Priority
EP 2011064670 W 20110825
Abstract (en)
[origin: WO2013026493A1] A mask structure configured for deposition of a layer on a rectangular substrate, e.g. an edge exclusion mask configured for deposition of a layer on a rectangular substrate is described. The mask structure includes a mask frame adapted for masking the edge of the substrate during layer deposition, wherein the mask frame comprises at least two mask frame side portions forming a corner in a corner area there between, wherein the mask frame is shaped to overlap the edge of the rectangular substrate such that a first overlap width at the side portions is larger than a second overlap width in the corner area.
IPC 8 full level
C23C 14/04 (2006.01); C23C 2/00 (2006.01); C23C 4/00 (2006.01); C23C 4/02 (2006.01); C23C 8/04 (2006.01); C23C 10/04 (2006.01); C23C 16/04 (2006.01)
CPC (source: EP KR US)
C23C 2/0064 (2022.08 - EP KR US); C23C 4/01 (2016.01 - EP KR); C23C 4/02 (2013.01 - KR); C23C 8/04 (2013.01 - EP KR); C23C 10/04 (2013.01 - EP KR); C23C 14/042 (2013.01 - EP KR); C23C 16/042 (2013.01 - EP KR)
Citation (search report)
See references of WO 2013026493A1
Citation (examination)
- US 2002011406 A1 20020131 - SHISHIDO AKIRA [JP], et al
- JP H10142604 A 19980529 - SHARP KK
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013026493 A1 20130228; CN 103781935 A 20140507; CN 103781935 B 20170711; EP 2748349 A1 20140702; JP 2014529011 A 20141030; JP 5911958 B2 20160427; KR 20140054222 A 20140508; TW 201310567 A 20130301; TW I541924 B 20160711
DOCDB simple family (application)
EP 2011064670 W 20110825; CN 201180072988 A 20110825; EP 11749406 A 20110825; JP 2014526396 A 20110825; KR 20147006486 A 20110825; TW 101125656 A 20120717