EP 2751834 A1 20140709 - DEVICE AND SYSTEM FOR PROCESSING FLAT SUBSTRATES
Title (en)
DEVICE AND SYSTEM FOR PROCESSING FLAT SUBSTRATES
Title (de)
VORRICHTUNG UND ANLAGE ZUM BEARBEITEN VON FLACHEN SUBSTRATEN
Title (fr)
DISPOSITIF ET INSTALLATION DE TRAITEMENT DE SUBSTRATS PLATS
Publication
Application
Priority
- DE 102011081981 A 20110901
- EP 2012066501 W 20120824
Abstract (en)
[origin: WO2013030109A1] The invention relates to a device for wetting flat substrates with a fluid on the underside of the substrates while the substrates pass along a transport path, said device comprising a wetting roller perpendicular to the transport direction, wherein the wetting roller extends to just before the transport plane from below and is immersed in a supply of fluid located therebelow. The device is an independently operable assembly together with the wetting roller and an elongated container for the fluid supply, which has an elongated design in the manner of a closed trough having an elongated opening at the top, which is substantially filled by the wetting roller. The wetting roller extends substantially within the container, wherein in a lower area, the container has drain openings at the bottom into a drain trough arranged below the container.
IPC 8 full level
H01L 21/677 (2006.01); B05C 1/08 (2006.01); H01L 21/67 (2006.01)
CPC (source: CN EP)
B05C 1/08 (2013.01 - CN EP); B05C 1/0813 (2013.01 - CN EP); B05C 1/0821 (2013.01 - CN EP); B05C 11/1039 (2013.01 - CN EP); H01L 21/6715 (2013.01 - CN EP); H01L 21/6776 (2013.01 - CN EP)
Citation (search report)
See references of WO 2013030109A1
Citation (examination)
- DE 102005062527 A1 20070621 - SCHMID GMBH & CO GEB [DE]
- JP H0864521 A 19960308 - ABLE KK
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102011081981 A1 20130307; CN 103765572 A 20140430; EP 2751834 A1 20140709; JP 2014526971 A 20141009; KR 20140054105 A 20140508; TW 201328785 A 20130716; WO 2013030109 A1 20130307
DOCDB simple family (application)
DE 102011081981 A 20110901; CN 201280042853 A 20120824; EP 12758806 A 20120824; EP 2012066501 W 20120824; JP 2014527603 A 20120824; KR 20147004455 A 20120824; TW 101131928 A 20120831