EP 2754171 A2 20140716 - PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD
Title (en)
PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD
Title (de)
PASSIVE POSITIONSKOMPENSATION EINER SPINDEL, PLATTFORM ODER KOMPONENTE UNTER WÄRMEBELASTUNG
Title (fr)
COMPENSATION DE POSITION PASSIVE D'UNE BROCHE, D'UN ÉTAGE OU D'UN COMPOSANT EXPOSÉ À UNE CHARGE CALORIFIQUE
Publication
Application
Priority
- US 201113226492 A 20110906
- US 2012053990 W 20120906
Abstract (en)
[origin: US2013057855A1] Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.
IPC 8 full level
G01N 21/95 (2006.01); G02B 7/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP US)
G02B 7/008 (2013.01 - EP US); H01L 21/67103 (2013.01 - EP US); H01L 21/68792 (2013.01 - EP US); G01N 21/9501 (2013.01 - EP US); G01N 2201/021 (2013.01 - EP US); Y10T 403/21 (2015.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2013057855 A1 20130307; US 8995066 B2 20150331; EP 2754171 A2 20140716; EP 2754171 A4 20150506; JP 2014531583 A 20141127; JP 2018109632 A 20180712; JP 6368644 B2 20180801; KR 102046189 B1 20191118; KR 20140061476 A 20140521; WO 2013036660 A2 20130314; WO 2013036660 A3 20130502
DOCDB simple family (application)
US 201113226492 A 20110906; EP 12830504 A 20120906; JP 2014529862 A 20120906; JP 2018006765 A 20180118; KR 20147008468 A 20120906; US 2012053990 W 20120906