EP 2768920 A4 20150603 - NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
Title (en)
NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
Title (de)
AMINFREIE POST-KMP-ZUSAMMENSETZUNG UND ANWENDUNGSVERFAHREN DAFÜR
Title (fr)
COMPOSITION APRÈS CMP SANS AMINES, AINSI QUE SON PROCÉDÉ D'UTILISATION
Publication
Application
Priority
US 2011057287 W 20111021
Abstract (en)
[origin: WO2013058770A1] A cleaning composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The cleaning compositions are substantially devoid of amine and ammonium-containing compounds, e.g., quaternary ammonium bases. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device without compromising the low-k dielectric material or the copper interconnect material.
IPC 8 full level
H01L 21/02 (2006.01); C11D 3/04 (2006.01); C11D 3/43 (2006.01); C11D 7/06 (2006.01); C11D 7/50 (2006.01); C11D 3/20 (2006.01); C11D 3/34 (2006.01); C11D 7/26 (2006.01); C11D 7/34 (2006.01)
CPC (source: CN EP)
C11D 3/044 (2013.01 - CN EP); C11D 3/43 (2013.01 - CN EP); C11D 7/06 (2013.01 - CN EP); C11D 7/5009 (2013.01 - CN EP); C11D 7/5022 (2013.01 - CN EP); H01L 21/02057 (2013.01 - CN EP); H01L 21/02063 (2013.01 - CN EP); H01L 21/02074 (2013.01 - CN EP); C11D 3/2041 (2013.01 - CN EP); C11D 3/2065 (2013.01 - CN EP); C11D 3/2068 (2013.01 - CN EP); C11D 3/3454 (2013.01 - CN EP); C11D 7/261 (2013.01 - CN EP); C11D 7/263 (2013.01 - CN EP); C11D 7/34 (2013.01 - CN EP); C11D 2111/22 (2024.01 - CN EP)
Citation (search report)
- [XY] WO 2007047365 A2 20070426 - ADVANCED TECH MATERIALS [US], et al
- [X] US 2005245411 A1 20051103 - YANG BO [US], et al
- [Y] WO 2008039730 A1 20080403 - ADVANCED TECH MATERIALS [US], et al
- See references of WO 2013058770A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013058770 A1 20130425; CN 103958640 A 20140730; CN 103958640 B 20160518; CN 105869997 A 20160817; EP 2768920 A1 20140827; EP 2768920 A4 20150603; KR 101914817 B1 20181228; KR 20140082816 A 20140702
DOCDB simple family (application)
US 2011057287 W 20111021; CN 201180075099 A 20111021; CN 201610274374 A 20111021; EP 11874382 A 20111021; KR 20147013154 A 20111021