Global Patent Index - EP 2781504 A4

EP 2781504 A4 20150617 - CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN

Title (en)

CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN

Title (de)

ZYKLISCHE VERBINDUNG, HERSTELLUNGSVERFAHREN DAFÜR, STRAHLUNGSEMPFINDLICHE ZUSAMMENSETZUNG UND VERFAHREN ZUR FORMUNG EINER RESISTSTRUKTUR

Title (fr)

COMPOSÉ CYCLIQUE AINSI QUE SON PROCÉDÉ DE FABRICATION, COMPOSITION SENSIBLE AUX RAYONNEMENTS, ET PROCÉDÉ DE FORMATION DE MOTIF DE RÉSERVE

Publication

EP 2781504 A4 20150617 (EN)

Application

EP 12849981 A 20121114

Priority

  • JP 2011253312 A 20111118
  • JP 2012079528 W 20121114

Abstract (en)

[origin: EP2781504A1] A cyclic compound of the present invention has a molecular weight of 500 to 5000, and is represented by the following formula (1):

IPC 8 full level

C07C 69/54 (2006.01); C07C 67/14 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); H01L 21/027 (2006.01)

CPC (source: CN EP US)

C07C 67/14 (2013.01 - EP US); C07C 69/54 (2013.01 - CN EP US); G03F 7/027 (2013.01 - US); G03F 7/0382 (2013.01 - CN EP US); C07C 2601/14 (2017.04 - CN EP US); C07C 2603/92 (2017.04 - CN EP US)

Citation (search report)

  • [XI] JP 2004018421 A 20040122 - TOKUYAMA CORP
  • [X] JP 2000047018 A 20000218 - JSR CORP
  • [X] EP 0490631 A2 19920617 - HARRIS STEVEN J [IE], et al
  • [X] EP 0432990 A2 19910619 - LOCTITE IRELAND LTD [IE]
  • [XI] FU QI ET AL: "Effect of C-Tetramethyl Calix[4]resorcinarene Acrylate on Curing Behavior and Film Properties of Thiol-acrylate Coating System", CHEM. RES. CHINESE UNIVERSITIES, vol. 25, no. 5, 1 January 2009 (2009-01-01), pages 760 - 766, XP055150078
  • [X] K A. SEE ET AL: "Calixarenes. 26. Selective esterification and selective ester cleavage of calix[4]arenes", JOURNAL OF ORGANIC CHEMISTRY, vol. 56, no. 26, 1 January 1991 (1991-01-01), pages 7256 - 7268, XP055150082
  • [X] ZHI-TANG HUANG ET AL: "Study of Calixarenes, V. Friedel-Crafts Reaction of Calixarenes", CHEMISCHE BERICHTE, 1 March 1994 (1994-03-01), pages 519 - 523, XP055150079, Retrieved from the Internet <URL:http://onlinelibrary.wiley.com/store/10.1002/cber.19941270310/asset/19941270310_ftp.pdf?v=1&t=i1wa56iv&s=e103f3ff1061c1c6188a0609552e841145399a98> DOI: 10.1002/cber.19941270310
  • [X] ZHI-TANG HUANG ET AL: "SELECTIVE ESTERIFICATION OF CALIX (4) ARENES", SYNTHETIC COMMUNICATIONS: AN INTERNATIONAL JOURNAL FOR RAPID COMMUNICATION OF SYNTHETIC ORGANIC CHEMISTRY, TAYLOR & FRANCIS INC, PHILADELPHIA, PA; US, vol. 24, no. 1, 1 January 1994 (1994-01-01), pages 11 - 22, XP008072330, ISSN: 0039-7911
  • See references of WO 2013073582A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

EP 2781504 A1 20140924; EP 2781504 A4 20150617; EP 2781504 B1 20170104; CN 103958455 A 20140730; JP 6313045 B2 20180418; JP WO2013073582 A1 20150402; KR 102004692 B1 20190729; KR 20140104949 A 20140829; TW 201339133 A 20131001; US 2014329178 A1 20141106; US 9182666 B2 20151110; WO 2013073582 A1 20130523

DOCDB simple family (application)

EP 12849981 A 20121114; CN 201280056217 A 20121114; JP 2012079528 W 20121114; JP 2013544300 A 20121114; KR 20147013241 A 20121114; TW 101142887 A 20121116; US 201214359081 A 20121114