EP 2791618 A2 20141022 - NON-CONTACT SURFACE CHARACTERIZATION USING MODULATED ILLUMINATION
Title (en)
NON-CONTACT SURFACE CHARACTERIZATION USING MODULATED ILLUMINATION
Title (de)
BERÜHRUNGSLOSE OBERFLÄCHENCHARAKTERISIERUNG MIT MODULIERTER BELEUCHTUNG
Title (fr)
CARACTÉRISATION DE SURFACE SANS CONTACT UTILISANT UN ÉCLAIRAGE MODULÉ
Publication
Application
Priority
US 2011064417 W 20111212
Abstract (en)
[origin: WO2013105922A2] Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.
IPC 8 full level
G02B 27/22 (2006.01); G01B 11/25 (2006.01)
CPC (source: EP)
G01B 11/24 (2013.01); G01B 11/2527 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013105922 A2 20130718; WO 2013105922 A3 20130919; EP 2791618 A2 20141022; EP 2791618 A4 20150729; JP 2015505039 A 20150216
DOCDB simple family (application)
US 2011064417 W 20111212; EP 11879165 A 20111212; JP 2014545870 A 20111212