EP 2798223 B1 20181205 - ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
Title (en)
ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
Title (de)
ADAPTER FÜR VAKUUMPUMPEN UND ZUGEHÖRIGE PUMPVORRICHTUNG
Title (fr)
ADAPTATEUR POUR POMPES À VIDE ET DISPOSITIF DE POMPAGE ASSOCIÉ
Publication
Application
Priority
- FR 1104110 A 20111226
- EP 2012076330 W 20121220
Abstract (en)
[origin: WO2013098178A1] The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).
IPC 8 full level
F04D 19/04 (2006.01); F04D 25/16 (2006.01); F04D 29/60 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 25/16 (2013.01 - EP US); F04D 29/60 (2013.01 - US); F04D 29/601 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 2984972 A1 20130628; CN 104024645 A 20140903; CN 104024645 B 20160907; EP 2798223 A1 20141105; EP 2798223 B1 20181205; JP 2015503697 A 20150202; JP 6174599 B2 20170802; KR 101997308 B1 20191001; KR 20140119032 A 20141008; US 2014348634 A1 20141127; US 9970444 B2 20180515; WO 2013098178 A1 20130704
DOCDB simple family (application)
FR 1104110 A 20111226; CN 201280064599 A 20121220; EP 12818501 A 20121220; EP 2012076330 W 20121220; JP 2014549435 A 20121220; KR 20147020023 A 20121220; US 201214367131 A 20121220