EP 2805057 A1 20141126 - TURBOMOLECULAR PUMP
Title (en)
TURBOMOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- DE 202012000611 U 20120121
- EP 2013050172 W 20130108
Abstract (en)
[origin: WO2013107667A1] A turbomolecular pump has a rotor element (18) in a housing (16). The rotor element (18) is arranged on a rotor shaft (10). The rotor shaft (10) is supported by two bearing elements (12, 14) in the housing (16). The bearing element (12) on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element (12) that is acceptable for the bearing element (12) constructed as a roller bearing, the bearing element (12) is arranged in a chamber (36). Said chamber is connected via a channel (46) to the pre-vacuum area (38) and sealed relative to the high-vacuum area (34) by a gasket.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/059 (2006.01); F04D 29/08 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 19/042 (2013.01 - US); F04D 29/046 (2013.01 - US); F04D 29/059 (2013.01 - EP US); F04D 29/08 (2013.01 - EP US); F04D 29/083 (2013.01 - US)
Citation (search report)
See references of WO 2013107667A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 202012000611 U1 20130423; EP 2805057 A1 20141126; JP 2015504137 A 20150205; US 2014369809 A1 20141218; WO 2013107667 A1 20130725
DOCDB simple family (application)
DE 202012000611 U 20120121; EP 13700495 A 20130108; EP 2013050172 W 20130108; JP 2014552579 A 20130108; US 201314372338 A 20130108