EP 2805369 A2 20141126 - CHEMICAL VAPOUR DEPOSITION OF PTSI FROM ORGANOMETALLIC COMPLEXES OF PT
Title (en)
CHEMICAL VAPOUR DEPOSITION OF PTSI FROM ORGANOMETALLIC COMPLEXES OF PT
Title (de)
CHEMISCHE GASPHASENABSCHEIDUNG VON PTSI AUS ORGANOMETALLISCHEN PT-KOMPLEXEN
Title (fr)
DÉPÔT CHIMIQUE EN PHASE VAPEUR DE PTSI À PARTIR DE COMPLEXES ORGANOMÉTALLIQUES DE PT
Publication
Application
Priority
- FR 1250458 A 20120117
- IB 2013050397 W 20130116
Abstract (en)
[origin: WO2013108189A2] The present invention relates to the use, as a precursor for the chemical vapour deposition of PtSi at the surface of a support, of at least one organometallic complex of Pt comprising at least: - a ligand having a cyclic structure that comprises at least two non-adjacent C=C double bonds, or two ligands having a cyclic structure that each comprise a C=C double bond; and - a ligand chosen from *O-Si(R)3 and *N-(Si(R')3)2, with: the R units being chosen, independently of one another, from (C1-C4)alkoxy groups; the R' units being chosen, independently of one another, from (C1-C4)alkyl and (C3-C4)cycloalkyl groups; and * representing the coordination of the ligand to the platinum.
IPC 8 full level
H01M 4/92 (2006.01); C23C 16/42 (2006.01); H01M 4/88 (2006.01)
CPC (source: EP US)
C23C 16/42 (2013.01 - EP US); H01M 4/8807 (2013.01 - EP US); H01M 4/8867 (2013.01 - EP US); H01M 4/9008 (2013.01 - US); H01M 4/9041 (2013.01 - US); H01M 4/921 (2013.01 - EP US); H01M 4/925 (2013.01 - EP US); H01M 8/10 (2013.01 - US); H01M 2008/1095 (2013.01 - EP US); Y02E 60/50 (2013.01 - EP)
Citation (search report)
See references of WO 2013108189A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 2985740 A1 20130719; EP 2805369 A2 20141126; US 2015004529 A1 20150101; WO 2013108189 A2 20130725; WO 2013108189 A3 20131121
DOCDB simple family (application)
FR 1250458 A 20120117; EP 13707045 A 20130116; IB 2013050397 W 20130116; US 201314372908 A 20130116