EP 2806222 B1 20170405 - Clean room for producing objects and method for operating a clean room
Title (en)
Clean room for producing objects and method for operating a clean room
Title (de)
Reinraum zum Produzieren von Gegenständen und Verfahren zum Betreiben eines Reinraums
Title (fr)
Salle blanche destinée à produire des objets et procédé de fonctionnement d'une salle blanche
Publication
Application
Priority
DE 102013105287 A 20130523
IPC 8 full level
F24F 3/16 (2006.01); B25H 1/20 (2006.01); F24F 13/08 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP)
F24F 3/167 (2021.01); F24F 13/08 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2806222 A2 20141126; EP 2806222 A3 20141224; EP 2806222 B1 20170405; DE 102013105287 A1 20141127
DOCDB simple family (application)
EP 14168712 A 20140516; DE 102013105287 A 20130523