EP 2807670 A1 20141203 - METHOD FOR PRODUCING ELECTRICALLY SEMICONDUCTIVE OR CONDUCTIVE LAYERS WITH IMPROVED CONDUCTIVITY
Title (en)
METHOD FOR PRODUCING ELECTRICALLY SEMICONDUCTIVE OR CONDUCTIVE LAYERS WITH IMPROVED CONDUCTIVITY
Title (de)
VERFAHREN ZUR HERSTELLUNG ELEKTRISCH HALBLEITENDER ODER LEITENDER SCHICHTEN MIT VERBESSERTER LEITFÄHIGKEIT
Title (fr)
PROCÉDÉ DE FABRICATION DE COUCHES ÉLECTRIQUEMENT SEMI-CONDUCTRICES OU CONDUCTRICES PRÉSENTANT UNE CONDUCTIVITÉ AMÉLIORÉE
Publication
Application
Priority
- DE 102012001508 A 20120127
- DE 102012006045 A 20120327
- EP 2013000063 W 20130110
Abstract (en)
[origin: WO2013110434A1] The invention relates to a method for producing electrically semiconductive or conductive metal oxide layers with improved conductivity that are particularly suitable for the production of flexible thin-film transistors, to metal oxide layers produced therewith, and to the use thereof for producing electronic components.
IPC 8 full level
H01L 21/02 (2006.01); H01L 21/368 (2006.01)
CPC (source: CN EP KR US)
H01L 21/0237 (2013.01 - CN EP US); H01L 21/02472 (2013.01 - CN EP US); H01L 21/02483 (2013.01 - CN EP US); H01L 21/02505 (2013.01 - CN EP US); H01L 21/02554 (2013.01 - CN EP US); H01L 21/02565 (2013.01 - CN EP US); H01L 21/02628 (2013.01 - CN EP US); H01L 21/02664 (2013.01 - US); H01L 29/66969 (2013.01 - US); H01L 29/7869 (2013.01 - KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013110434 A1 20130801; CN 104081498 A 20141001; EP 2807670 A1 20141203; JP 2015513210 A 20150430; KR 20140129061 A 20141106; TW 201337036 A 20130916; US 2014367676 A1 20141218
DOCDB simple family (application)
EP 2013000063 W 20130110; CN 201380006470 A 20130110; EP 13701564 A 20130110; JP 2014553656 A 20130110; KR 20147023813 A 20130110; TW 102103023 A 20130125; US 201314374250 A 20130110