EP 2811529 B1 20191204 - SILICON CARBIDE SEMICONDUCTOR DEVICE
Title (en)
SILICON CARBIDE SEMICONDUCTOR DEVICE
Title (de)
HALBLEITERBAUELEMENT AUS SILICIUMCARBID
Title (fr)
DISPOSITIF SEMI-CONDUCTEUR DE CARBURE DE SILICIUM
Publication
Application
Priority
- US 201261593681 P 20120201
- JP 2012036988 A 20120223
- JP 2012082493 W 20121214
Abstract (en)
[origin: US2013193447A1] A silicon carbide semiconductor device includes an insulation film, and a silicon carbide layer having a surface covered with the insulation film. The surface includes a first region. The first region has a first plane orientation at least partially. The first plane orientation is any of a (0-33-8) plane, (30-3-8) plane, (-330-8) plane, (03-3-8) plane, (-303-8) plane, and (3-30-8) plane.
IPC 8 full level
H01L 29/78 (2006.01); H01L 29/04 (2006.01); H01L 29/12 (2006.01); H01L 29/423 (2006.01)
CPC (source: CN EP US)
H01L 21/049 (2013.01 - CN EP US); H01L 21/3065 (2013.01 - CN EP US); H01L 29/045 (2013.01 - CN EP US); H01L 29/1608 (2013.01 - CN EP US); H01L 29/4236 (2013.01 - CN EP US); H01L 29/66068 (2013.01 - CN EP US); H01L 29/78 (2013.01 - CN EP US); H01L 29/7802 (2013.01 - CN EP US); H01L 29/7813 (2013.01 - CN EP US); H01L 21/0475 (2013.01 - CN EP US); H01L 29/0696 (2013.01 - CN EP US); H01L 29/518 (2013.01 - CN EP US)
Citation (examination)
- JP 2005340685 A 20051208 - FUJI ELECTRIC HOLDINGS
- SHINSUKE HARADA ET AL: "Isotropic Channel Mobility in UMOSFETs on 4H-SiC C-Face with Vicinal Off-Angle", MATERIALS SCIENCE FORUM, vol. 645-648, 1 April 2010 (2010-04-01), pages 999 - 1004, XP055138554, DOI: 10.4028/www.scientific.net/MSF.645-648.999
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
US 2013193447 A1 20130801; US 8829535 B2 20140909; CN 104025300 A 20140903; CN 104025300 B 20170222; EP 2811529 A1 20141210; EP 2811529 A4 20150708; EP 2811529 B1 20191204; JP 2013162118 A 20130819; JP 6119100 B2 20170426; WO 2013114743 A1 20130808
DOCDB simple family (application)
US 201213722486 A 20121220; CN 201280065718 A 20121214; EP 12867527 A 20121214; JP 2012036988 A 20120223; JP 2012082493 W 20121214