EP 2821650 A2 20150107 - Membrane vacuum pump
Title (en)
Membrane vacuum pump
Title (de)
Membranvakuumpumpe
Title (fr)
Pompe sous vide à membrane
Publication
Application
Priority
DE 102013213257 A 20130705
Abstract (en)
[origin: US2015010409A1] A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.
Abstract (de)
Die Erfindung betrifft eine Membranvakuumpumpe mit wenigstens einer Membranpumpstufe, wenigstens einem der Membranpumpstufe zugeordneten Einlassventil für ein zu förderndes Prozessgas und wenigstens einem Gasballastventil zur Zuführung eines Ballastgases, wobei der durch das Gasballastventil führende Strömungsweg für das Ballastgas in Strömungsrichtung des Prozessgases hinter dem Einlassventil in den Strömungsweg für das Prozessgas mündet.
IPC 8 full level
F04B 37/14 (2006.01); F04B 41/06 (2006.01); F04B 45/04 (2006.01); F04B 49/03 (2006.01); F04B 53/04 (2006.01); F04C 25/02 (2006.01); F04D 19/04 (2006.01)
CPC (source: EP US)
F04B 37/14 (2013.01 - EP US); F04B 41/06 (2013.01 - EP US); F04B 45/027 (2013.01 - US); F04B 45/04 (2013.01 - EP US); F04B 49/03 (2013.01 - EP US); F04B 49/06 (2013.01 - US); F04B 53/04 (2013.01 - EP US); F04D 19/042 (2013.01 - EP US); F04C 23/005 (2013.01 - EP US); F04C 2220/50 (2013.01 - EP US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 2821650 A2 20150107; EP 2821650 A3 20150225; EP 2821650 B1 20200603; CN 104279147 A 20150114; DE 102013213257 A1 20150108; JP 2015014285 A 20150122; US 2015010409 A1 20150108
DOCDB simple family (application)
EP 14171516 A 20140606; CN 201410321520 A 20140707; DE 102013213257 A 20130705; JP 2014127871 A 20140623; US 201414320750 A 20140701