EP 2826057 A1 20150121 - MINI ROTATABLE SPUTTER DEVICES FOR SPUTTER DEPOSITION
Title (en)
MINI ROTATABLE SPUTTER DEVICES FOR SPUTTER DEPOSITION
Title (de)
DREHBARE MINIZERSTÄUBERVORRICHTUNGEN FÜR ZERSTÄUBUNGSABSCHEIDUNGEN
Title (fr)
MINI-DISPOSITIFS DE PULVÉRISATION CATHODIQUE ROTATIFS POUR DÉPOSITION PAR PULVÉRISATION CATHODIQUE
Publication
Application
Priority
EP 2012054261 W 20120312
Abstract (en)
[origin: WO2013135265A1] A deposition apparatus and a method for depositing deposition material on a web is described. The deposition apparatus includes a first sputter device support defining a first axis for a first rotatable sputter device, a second sputter device support defining a second axis for a second rotatable sputter device, and a coating window. The first sputter device support and the second sputter device support are adapted for supporting the first rotatable sputter device and the second rotatable sputter device to provide at least a component of the deposition material to be deposited on the web over a coating drum. Further, the distance between the first axis and the second axis is smaller than about 200 mm.
IPC 8 full level
H01J 37/34 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP US)
C23C 14/35 (2013.01 - US); H01J 37/3277 (2013.01 - EP US); H01J 37/3405 (2013.01 - EP US); H01J 37/3414 (2013.01 - EP US); H01J 37/3417 (2013.01 - EP US); H01J 37/342 (2013.01 - EP US)
Citation (search report)
See references of WO 2013135265A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2013135265 A1 20130919; CN 104160471 A 20141119; CN 104160471 B 20171128; EP 2826057 A1 20150121; EP 2826057 B1 20180124; JP 2015511667 A 20150420; JP 6073383 B2 20170201; KR 101780466 B1 20170921; KR 20140138908 A 20141204; TW 201348482 A 20131201; TW I567216 B 20170121; US 2016189939 A1 20160630
DOCDB simple family (application)
EP 2012054261 W 20120312; CN 201280071216 A 20120312; EP 12709309 A 20120312; JP 2014561293 A 20120312; KR 20147028546 A 20120312; TW 102108667 A 20130312; US 201214384287 A 20120312