EP 2826999 B1 20210303 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
DE 102013213815 A 20130715
Abstract (en)
[origin: US2015016958A1] A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/10 (2006.01); F16J 15/44 (2006.01)
CPC (source: CN EP US)
F04D 19/04 (2013.01 - CN EP US); F04D 19/042 (2013.01 - CN EP US); F04D 29/056 (2013.01 - US); F04D 29/102 (2013.01 - CN EP US); F04D 29/646 (2013.01 - US); Y10T 29/49245 (2015.01 - EP US)
Citation (examination)
- EP 0773367 A1 19970514 - VARIAN SPA [IT]
- JP 2009047178 A 20090305 - EBARA CORP
- JP 2005069066 A 20050317 - EBARA CORP
- US 2006245960 A1 20061102 - SCHOOLING JENNIFER M [GB], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2826999 A1 20150121; EP 2826999 B1 20210303; CN 104295509 A 20150121; DE 102013213815 A1 20150115; JP 2015017611 A 20150129; JP 6154787 B2 20170628; US 2015016958 A1 20150115; US 9909592 B2 20180306
DOCDB simple family (application)
EP 14173399 A 20140623; CN 201410334674 A 20140714; DE 102013213815 A 20130715; JP 2014141915 A 20140710; US 201414328766 A 20140711