EP 2831909 A1 20150204 - DEVICE FOR IRRADIATING A SUBSTRATE
Title (en)
DEVICE FOR IRRADIATING A SUBSTRATE
Title (de)
VORRICHTUNG ZUR BESTRAHLUNG EINES SUBSTRATS
Title (fr)
DISPOSITIF D'IRRADIATION D'UN SUBSTRAT
Publication
Application
Priority
- DE 102012005916 A 20120326
- EP 2013000149 W 20130118
Abstract (en)
[origin: WO2013143633A1] Known devices for irradiating a substrate have a receptacle for the substrate to be irradiated, with a circular irradiation area and a first optical radiator with at least one radiator tube arranged on an illumination plane running parallel to the irradiation area. The illumination length of the radiator tube comprises a centre section and two end sections, wherein the length of the centre section makes up at least 50% of the illumination length. The receptacle and the optical radiator can be moved relative to each other. In order to specify, on the basis thereof, a device for the thermal treatment of a substrate that enables a homogeneous or rotationally symmetrical heating of the substrate, and that also requires low design and control technology effort, the invention proposes that the radiator tube has a continuously decreasing curvature in the centre section thereof, under the proviso that the illumination length of the radiator tube extends over a bend angle of less than 2 pi.
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: CN EP US)
B01J 19/128 (2013.01 - US); B05D 3/06 (2013.01 - US); H01L 21/67115 (2013.01 - CN EP US)
Citation (search report)
See references of WO 2013143633A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102012005916 B3 20130627; CN 104350589 A 20150211; CN 104350589 B 20170915; EP 2831909 A1 20150204; JP 2015520010 A 20150716; JP 6000441 B2 20160928; KR 101620775 B1 20160512; KR 20140126403 A 20141030; US 2015048261 A1 20150219; US 9248425 B2 20160202; WO 2013143633 A1 20131003
DOCDB simple family (application)
DE 102012005916 A 20120326; CN 201380016519 A 20130118; EP 13702891 A 20130118; EP 2013000149 W 20130118; JP 2015502117 A 20130118; KR 20147026574 A 20130118; US 201314388021 A 20130118