EP 2835218 B1 20170726 - Chemical mechanical polishing fastening fixture and fastening base
Title (en)
Chemical mechanical polishing fastening fixture and fastening base
Title (de)
Befestigungsfixierung zum chemisch mechanischen Polieren und Befestigungsbasis
Title (fr)
Dispositif de fixation de polissage mécanique chimique et base de fixation
Publication
Application
Priority
EP 13179742 A 20130808
Abstract (en)
[origin: EP2835218A1] A chemical mechanical polishing fastening fixture includes a fastening base (100) and a fastening ring (200). The fastening base (100) includes an annular substrate having a first combining face (101) and a plurality of protruded blocks (110) annularly aligned on the first combining face (101). Each protruded block (110) is made of polyphenylene sulfide and includes a first buckling face (114). The first buckling face (114) is tilted from a root portion thereof toward an outer side of the protruded block (110) along a plane radially extending from the annular substrate. The fastening ring (200) has a second combing face (201) and a plurality of first grooves (210). The first grooves (210) are annularly aligned on the second combining face (201). Parts of a flange of each first groove (210) are constituted of a second buckling face (215), and the second buckling face (215) is tilted from a root portion thereof toward the second combining face (201).
IPC 8 full level
B24B 37/32 (2012.01)
CPC (source: EP)
B24B 37/32 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 13179742 A 20130808