EP 2835536 A3 20150506 - Vacuum pump stage with special surface roughness yielding a lower gas friction

Title (en)

Vacuum pump stage with special surface roughness yielding a lower gas friction

Vakuumpumpstufe mit besonderer Oberflächenrauigkeit zur Reduzierung der Gasreibung

Étage de pompe à vide avec rugosité de surface particulière engendrant une réduction du frottement gazeux

DE 102013108482 A 20130806

F04D 17/16 (2006.01); F04D 19/04 (2006.01); F04D 29/16 (2006.01); F04D 29/40 (2006.01); F04D 29/68 (2006.01)

F04D 17/168 (2013.01); F04D 23/008 (2013.01); F04D 29/403 (2013.01); F04D 29/681 (2013.01); F05D 2300/516 (2013.01)

[A] EP 1724469 A2 20061122 - VARIAN INC [US]
[XY] FR 2619867 A1 19890303 - PFEIFFER VAKUUMTECHNIK [DE]
[XAY] EP 0568069 A2 19931103 - VARIAN ASSOCIATES [US]
[X] DE 202004010821 U1 20041223 - BOC GROUP PLC [GB]
[X] DE 3317868 A1 19841122 - LEYBOLD HERAEUS GMBH & CO KG [DE]
[XA] JP 2009062812 A 20090326 - OSAKA VACUUM LTD
[XI] GB 2298457 A 19960904 - HITACHI LTD [JP]
[X] DE 102005008388 A1 20060831 - BECKER GMBH & CO KG GEB [DE]
[XY] JP H01267390 A 19891025 - DAIKIN IND LTD
[XI] JP S63147990 A 19880620 - DAIKIN IND LTD
[X] EP 0805275 A2 19971105 - BOC GROUP PLC [GB]
[A] EP 2253851 A2 20101124 - PFEIFFER VACUUM GMBH [DE]
[X] DE 3932228 A1 19900405 - HITACHI LTD [JP]
[X] US 2005118013 A1 20050602 - DOWNHAM STEPHEN E [GB]
[I] US 5709528 A 19980120 - HABLANIAN MARSBED [US]
[Y] MARYLAND METRICS: "SURFACE ROUGHNESS TABLES", 1 January 1998 (1998-01-01), XP055155944, Retrieved from the Internet <URL:http://mdmetric.com/pdf/surfruff.pdf> [retrieved on 20141201]

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EP 14176840 A 20140714; DE 102013108482 A 20130806; EP 16171240 A 20140714; EP 16171251 A 20140714