EP 2837047 A1 20150218 - FUNCTIONALIZATION OF A SUBSTRATE
Title (en)
FUNCTIONALIZATION OF A SUBSTRATE
Title (de)
FUNKTIONALISIERUNG EINES SUBSTRATS
Title (fr)
FONCTIONNALISATION D'UN SUBSTRAT
Publication
Application
Priority
- CA 2774591 A 20120413
- US 201213446927 A 20120413
- US 201261673147 P 20120718
- US 201361806855 P 20130330
- CA 2013050291 W 20130415
Abstract (en)
[origin: WO2013152446A1] A method of increasing a work function of an electrode is provided. The method comprises obtaining an electronegative species from a precursor using electromagnetic radiation and reacting a surface of the electrode with the electronegative species. An electrode comprising a functionalized substrate is also provided.
IPC 8 full level
C23C 8/08 (2006.01); C23C 8/36 (2006.01); H01L 21/28 (2006.01); H01L 51/50 (2006.01)
CPC (source: CN EP)
C23C 8/26 (2013.01 - EP); C23C 8/36 (2013.01 - EP); C23C 8/38 (2013.01 - EP); H10K 50/17 (2023.02 - CN EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2013152446 A1 20131017; CA 2870236 A1 20131017; CN 104272489 A 20150107; EP 2837047 A1 20150218; EP 2837047 A4 20151223; JP 2015522707 A 20150806; JP 6412493 B2 20181024; KR 102074255 B1 20200206; KR 20150002812 A 20150107
DOCDB simple family (application)
CA 2013050291 W 20130415; CA 2870236 A 20130415; CN 201380019756 A 20130415; EP 13775065 A 20130415; JP 2015504828 A 20130415; KR 20147031808 A 20130415