EP 2842155 B1 20171206 - PROCESS FOR BONDING IN AN ATMOSPHERE OF A GAS HAVING A NEGATIVE JOULE-THOMSON COEFFICIENT
Title (en)
PROCESS FOR BONDING IN AN ATMOSPHERE OF A GAS HAVING A NEGATIVE JOULE-THOMSON COEFFICIENT
Title (de)
BINDUNGSVERFAHREN IN DER ATMOSPHÄRE EINES GASES MIT EINEM NEGATIVEN JOULE-THOMSON-KOEFFIZIENTEN
Title (fr)
PROCEDE DE COLLAGE DANS UNE ATMOSPHERE DE GAZ PRESENTANT UN COEFFICIENT DE JOULE-THOMSON NEGATIF
Publication
Application
Priority
- FR 1253921 A 20120427
- IB 2013053229 W 20130424
Abstract (en)
[origin: WO2013160841A1] The present invention relates to a process for direct bonding two substrates, comprising at least: (a) bringing the surfaces to be bonded of said substrates in close contact; and (b) propagating a bonding wave between said substrates, characterised in that said substrates are kept, during step (b), in an atmosphere of a gas having a negative Joule-Thomson coefficient at the temperature and pressure of said atmosphere.
IPC 8 full level
H01L 25/065 (2006.01); H01L 21/18 (2006.01); H01L 21/20 (2006.01); H01L 21/302 (2006.01); H01L 21/762 (2006.01); H01L 23/00 (2006.01)
CPC (source: CN EP US)
H01L 21/187 (2013.01 - CN EP US); H01L 21/2007 (2013.01 - CN EP US); H01L 21/76251 (2013.01 - US); H01L 21/76254 (2013.01 - CN EP US); H01L 24/80 (2013.01 - US); H01L 25/0657 (2013.01 - US); H01L 21/302 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013160841 A1 20131031; CN 104488066 A 20150401; CN 104488066 B 20180420; EP 2842155 A1 20150304; EP 2842155 B1 20171206; FR 2990054 A1 20131101; FR 2990054 B1 20140502; JP 2015515151 A 20150521; KR 102094561 B1 20200327; KR 20150013556 A 20150205; TW 201351543 A 20131216; TW I616966 B 20180301; US 2015079759 A1 20150319; US 9576843 B2 20170221
DOCDB simple family (application)
IB 2013053229 W 20130424; CN 201380022409 A 20130424; EP 13727372 A 20130424; FR 1253921 A 20120427; JP 2015507645 A 20130424; KR 20147032479 A 20130424; TW 102115139 A 20130426; US 201314397390 A 20130424