EP 2844878 A1 20150311 - VACUUM PUMP SYSTEM FOR EVACUATING A CHAMBER, AND METHOD FOR CONTROLLING A VACUUM PUMP SYSTEM
Title (en)
VACUUM PUMP SYSTEM FOR EVACUATING A CHAMBER, AND METHOD FOR CONTROLLING A VACUUM PUMP SYSTEM
Title (de)
VAKUUMPUMPENSYSTEM ZUR EVAKUIERUNG EINER KAMMER SOWIE VERFAHREN ZUR STEUERUNG EINES VAKUUMPUMPENSYSTEMS
Title (fr)
SYSTÈME DE POMPE À VIDE POUR FAIRE LE VIDE DANS UNE CHAMBRE AINSI QUE PROCÉDÉ DE COMMANDE D'UN SYSTÈME DE POMPE À VIDE
Publication
Application
Priority
- DE 102012220442 A 20121109
- EP 2013073021 W 20131105
Abstract (en)
[origin: WO2014072276A1] A vacuum pump system for evacuating a chamber (10) has a main pump system (12, 14) which is connected to the chamber (10). An auxiliary pump system (20) is connected to the main pump system (12, 14), wherein the auxiliary pump system (20) has an ejector pump. Regulating of the rotational speed of the at least one pump of the main pump system (12, 14) takes place with the aid of the method according to the invention depending on a pressure which is measured at the outlet (16) or at the inlet (50) of the main pump system (12, 14).
IPC 8 full level
F04C 23/00 (2006.01); F04C 25/02 (2006.01); F04C 28/02 (2006.01); F04C 28/08 (2006.01)
CPC (source: CN EP)
F04C 23/005 (2013.01 - CN EP); F04C 25/02 (2013.01 - CN EP); F04C 28/02 (2013.01 - CN EP); F04C 28/08 (2013.01 - CN EP); F04C 18/126 (2013.01 - CN EP); F04C 18/16 (2013.01 - CN EP); F04C 2270/21 (2013.01 - CN EP); F04C 2270/56 (2013.01 - CN EP)
Citation (search report)
See references of WO 2014072276A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102012220442 A1 20140515; CN 104822943 A 20150805; CN 104822943 B 20161221; EP 2844878 A1 20150311; EP 2844878 B1 20150715; KR 102141077 B1 20200804; KR 20150082519 A 20150715; TW 201430219 A 20140801; TW I609131 B 20171221; WO 2014072276 A1 20140515
DOCDB simple family (application)
DE 102012220442 A 20121109; CN 201380058746 A 20131105; EP 13786477 A 20131105; EP 2013073021 W 20131105; KR 20157014938 A 20131105; TW 102140082 A 20131105