EP 2847577 A1 20150318 - METHOD AND APPARATUS FOR ELECTROLUMINESCENCE INSPECTION AND/OR PHOTOLUMINESCENCE INSPECTION
Title (en)
METHOD AND APPARATUS FOR ELECTROLUMINESCENCE INSPECTION AND/OR PHOTOLUMINESCENCE INSPECTION
Title (de)
VERFAHREN UND VORRICHTUNG ZUR ELEKTROLUMINESZENZ-INSPEKTION UND/ODER FOTOLUMINESZENZ-INSPEKTION
Title (fr)
PROCÉDÉ ET DISPOSITIF D'INSPECTION D'ÉLECTROLUMINESCENCE ET/OU D'INSPECTION DE PHOTOLUMINESCENCE
Publication
Application
Priority
- DE 102012104086 A 20120509
- EP 2013058999 W 20130430
Abstract (en)
[origin: WO2013167428A1] A method and an apparatus for electroluminescence inspection and/or photoluminescence inspection of an object (2) capable of luminescence are described, in which the object (2) is excited to emit electromagnetic radiation (8) by applying a voltage and/or shining in light, and the electromagnetic radiation (8) is captured by an optical recording device (9) and is output in the form of an image (20, 21, 22), wherein the image (20, 21, 22) is subjected to image evaluation and possible defects of the object (2) are determined in the image evaluation. Provision is also made for the electromagnetic radiation (8) to be captured by the recording device (9) in at least two images (21, 22) in different spectral ranges.
IPC 8 full level
G01N 21/95 (2006.01)
CPC (source: EP US)
G01N 21/6489 (2013.01 - EP US); G01N 21/66 (2013.01 - EP US); G01N 21/9501 (2013.01 - EP US); G06T 7/0004 (2013.01 - US); H01L 27/14603 (2013.01 - EP US)
Citation (search report)
See references of WO 2013167428A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2013167428 A1 20131114; CN 104471383 A 20150325; DE 102012104086 A1 20131128; EP 2847577 A1 20150318; KR 20150009576 A 20150126; US 2015070487 A1 20150312
DOCDB simple family (application)
EP 2013058999 W 20130430; CN 201380024197 A 20130430; DE 102012104086 A 20120509; EP 13718862 A 20130430; KR 20147034487 A 20130430; US 201314399242 A 20130430