EP 2852968 A4 20160224 - COATING AND MATERIAL METHOD
Title (en)
COATING AND MATERIAL METHOD
Title (de)
BESCHICHTUNGS- UND MATERIALVERFAHREN
Title (fr)
PROCÉDÉ DE REVÊTEMENT ET DE PRODUCTION DE MATÉRIAU
Publication
Application
Priority
- FI 20120169 A 20120522
- FI 2013000025 W 20130522
Abstract (en)
[origin: WO2013175052A1] The innovation is targeted at the coating and material production method, which is based on the application of picosecond, femtosecond and attosecond pulses a) in a vacuum, b) in a gas-pressurised mode, c) in liquid state or d) in the clean room standard; the repetition frequency of the pulses is between the span of 100 kHz and 10 Ghz, with fibre reinforcement or semiconductor laser, which operate on the wavelength of the UV-visible-IR light. The laser beams are directed to a separate space a-d) with optic fibres or as a collimated beam and only inside this space is focused to the volatizing / processing material by self-cleansing optics.
IPC 8 full level
H01L 21/02 (2006.01); B23K 26/12 (2006.01); C23C 14/28 (2006.01); G02B 27/00 (2006.01)
CPC (source: EP FI)
B23K 26/0006 (2013.01 - EP FI); B23K 26/0624 (2015.10 - EP); B23K 26/0648 (2013.01 - EP FI); B23K 26/122 (2013.01 - FI); B23K 26/1224 (2015.10 - EP FI); B23K 26/123 (2013.01 - FI); B23K 26/32 (2013.01 - EP FI); B23K 26/34 (2013.01 - EP FI); B23K 26/361 (2015.10 - EP); C23C 14/28 (2013.01 - EP); G02B 27/0006 (2013.01 - FI); H01L 21/02266 (2013.01 - FI); B23K 2101/18 (2018.07 - EP FI); B23K 2103/50 (2018.07 - EP); C23C 14/28 (2013.01 - FI)
Citation (search report)
- [A] FR 1465435 A 19670113
- See references of WO 2013175052A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013175052 A1 20131128; EP 2852968 A1 20150401; EP 2852968 A4 20160224; FI 20120169 A 20140114
DOCDB simple family (application)
FI 2013000025 W 20130522; EP 13794641 A 20130522; FI 20120169 A 20120522