EP 2853350 A4 20160113 - POLISHING PAD AND METHOD FOR MANUFACTURING SAME
Title (en)
POLISHING PAD AND METHOD FOR MANUFACTURING SAME
Title (de)
POLIERKISSEN UND VERFAHREN ZUR HERSTELLUNG DAVON
Title (fr)
TAMPON À POLIR ET SON PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- KR 20120054523 A 20120523
- KR 2013001085 W 20130212
Abstract (en)
[origin: EP2853350A1] Polishing pad and method of manufacturing the same, the method, whereby materials for forming a polishing layer are mixed and solidified by a chemical reaction so as to manufacture the polishing pad, the method including: grinding organic materials by using a physical method so as to form micro-organic particles; mixing the micro-organic particles formed in the operation with the materials for forming the polishing layer; mixing at least one selected from the group consisting of inert gas, a capsule type foaming agent, and a chemical foaming agent that are capable of controlling sizes of pores, with the mixture in the operation so as to form gaseous pores; performing gelling and hardening of the mixture generated in the operation so as to form a polishing layer; and processing the polishing layer so as to distribute open pores defined by opening gaseous pores on a surface of the polishing layer.
IPC 8 full level
B24D 11/00 (2006.01); B24D 3/16 (2006.01)
CPC (source: CN EP KR US)
B24B 37/24 (2013.01 - CN EP US); B24B 37/26 (2013.01 - CN EP US); B24D 3/16 (2013.01 - KR); B24D 11/00 (2013.01 - KR); B24D 11/001 (2013.01 - CN EP US); B24D 11/003 (2013.01 - CN EP US); B24D 18/00 (2013.01 - CN EP US)
Citation (search report)
- [XYI] US 2003220061 A1 20031127 - PRASAD ABANESHWAR [US]
- [Y] WO 2010053729 A1 20100514 - GUISELIN OLIVIER L [US]
- [Y] WO 2004076127 A1 20040910 - DOW GLOBAL TECHNOLOGIES INC [US], et al
- [A] EP 1357161 A2 20031029 - JSR CORP [JP]
- [A] WO 2011041438 A2 20110407 - APPLIED MATERIALS INC [US], et al
Citation (examination)
- EP 1201368 A2 20020502 - JSR CORP [JP]
- EP 1175965 A2 20020130 - EBARA CORP [JP]
- See also references of WO 2013176378A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2853350 A1 20150401; EP 2853350 A4 20160113; CN 104507641 A 20150408; CN 104507641 B 20180105; JP 2015514598 A 20150521; JP 5959724 B2 20160802; KR 101417274 B1 20140709; KR 20130130893 A 20131203; SG 11201407257T A 20141230; US 2015133039 A1 20150514; WO 2013176378 A1 20131128
DOCDB simple family (application)
EP 13793745 A 20130212; CN 201380025329 A 20130212; JP 2015508847 A 20130212; KR 20120054523 A 20120523; KR 2013001085 W 20130212; SG 11201407257T A 20130212; US 201314397542 A 20130212