EP 2855345 A4 20160525 - FABRICATION OF DIRECTIONALLY ORIENTED BLOCK COPOLYMER FILMS
Title (en)
FABRICATION OF DIRECTIONALLY ORIENTED BLOCK COPOLYMER FILMS
Title (de)
HERSTELLUNG VON AUSGERICHTETEN BLOCKCOPOLYMERFILMEN
Title (fr)
FABRICATION DE FILMS À BASE DE COPOLYMÈRES SÉQUENCÉS À ORIENTATION DIRECTIONNELLE
Publication
Application
Priority
- US 201261655664 P 20120605
- US 2013044303 W 20130605
Abstract (en)
[origin: WO2013184795A2] Directionally oriented block copolymer films and zone annealing processes for producing directionally oriented block films are provided. The zone annealing processes include methods of inducing horizontally oriented block copolymers through a soft sheer process and methods of inducing vertically oriented block copolymers via sharp dynamic zone annealing. The zone annealing processes are capable of both small and large scale production of directionally oriented block films. The cold zone annealing processes are also capable of being combined with graphoepitaxy methods.
IPC 8 full level
B82Y 40/00 (2011.01); B32B 7/04 (2006.01); B32B 27/28 (2006.01)
CPC (source: EP US)
B29C 67/24 (2013.01 - EP US); B29C 71/0072 (2013.01 - EP US); B29C 71/02 (2013.01 - US); B81C 1/00031 (2013.01 - EP US); C08J 5/18 (2013.01 - US); G03F 7/0002 (2013.01 - EP US); B29C 2071/022 (2013.01 - EP US); B29K 2096/04 (2013.01 - US); B29K 2105/0085 (2013.01 - EP US); B29L 2007/008 (2013.01 - US); B81C 2201/0149 (2013.01 - EP US); C08J 2353/00 (2013.01 - EP US); C08J 2383/10 (2013.01 - EP US)
Citation (search report)
- [XYI] US 2006013956 A1 20060119 - ANGELESCU DAN E [US], et al
- [XY] US 8083953 B2 20111227 - MILLWARD DAN B [US], et al
- [Y] GB 1028357 A 19660504 - SHELL INT RESEARCH
- [Y] BRIAN C. BERRY ET AL: "Orientational Order in Block Copolymer Films Zone Annealed below the Order-Disorder Transition Temperature", NANO LETTERS, vol. 7, no. 9, 1 September 2007 (2007-09-01), pages 2789 - 2794, XP055176869, ISSN: 1530-6984, DOI: 10.1021/nl071354s
- [AP] ANONYMOUS: "Coefficients of linear thermal expansion", INTERNET CITATION, 1 April 2014 (2014-04-01), pages 1 - 9, XP002723878, Retrieved from the Internet <URL:http://www.engineeringtoolbox.com/linear-expansion-coefficients-d_95.html> [retrieved on 20140430]
- See references of WO 2013184795A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2013184795 A2 20131212; WO 2013184795 A3 20140220; CA 2875779 A1 20131212; CN 104395230 A 20150304; EP 2855345 A2 20150408; EP 2855345 A4 20160525; US 10099437 B2 20181016; US 2015298405 A1 20151022
DOCDB simple family (application)
US 2013044303 W 20130605; CA 2875779 A 20130605; CN 201380033534 A 20130605; EP 13800002 A 20130605; US 201314405844 A 20130605