EP 2871155 A4 20160330 - METHOD FOR PRODUCING POLYSILICON
Title (en)
METHOD FOR PRODUCING POLYSILICON
Title (de)
VERFAHREN ZUR HERSTELLUNG VON POLYSILICIUM
Title (fr)
PROCÉDÉ DE PRODUCTION D'UN POLYSILICIUM
Publication
Application
Priority
- JP 2012153809 A 20120709
- JP 2013068040 W 20130701
Abstract (en)
[origin: EP2871155A1] An object of the present invention is to recover heat effectively from high-temperature exhaust gas generated from a polysilicon deposition step and also to improve the production efficiency by reducing the adhesion and residues of silicon fine powders and polymers in the pipes and device, improving the recovery efficiency of the unreacted raw material gas and the like, lowering the washing frequency, and making possible a long-term continuous operation. There is provided a method for producing polysilicon comprising a deposition step for depositing polysilicon from raw material gas including chlorosilanes, and a heat recovery step of supplying exhaust gas generated from the deposition step in a boiler type heat recovery device provided with an exhaust gas pipe and then recovering heat, wherein a gas temperature at an exhaust gas pipe outlet of the boiler type heat recovery device is set to 200°C or more, and an exhaust gas flow rate at the exhaust gas pipe outlet in the boiler type heat recovery device is adjusted to 10m/second or higher.
IPC 8 full level
C01B 33/03 (2006.01); C01B 33/035 (2006.01); F22B 1/18 (2006.01)
CPC (source: EP KR US)
C01B 33/03 (2013.01 - EP KR US); C01B 33/035 (2013.01 - EP KR US); F22B 1/18 (2013.01 - US); Y02P 20/10 (2015.11 - EP US)
Citation (search report)
- [I] US 4805556 A 19890221 - HAGAN DAVID W [US], et al
- [AD] JP 2010150131 A 20100708 - MITSUBISHI MATERIALS CORP
- See references of WO 2014010457A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 2871155 A1 20150513; EP 2871155 A4 20160330; CN 104395237 A 20150304; JP WO2014010457 A1 20160623; KR 20150035803 A 20150407; TW 201406654 A 20140216; US 2015175430 A1 20150625; WO 2014010457 A1 20140116
DOCDB simple family (application)
EP 13817417 A 20130701; CN 201380034608 A 20130701; JP 2013068040 W 20130701; JP 2014524746 A 20130701; KR 20147036932 A 20130701; TW 102123929 A 20130704; US 201314412220 A 20130701