EP 2873307 B1 20160706 - SURFACE-WAVE APPLICATOR AND METHOD FOR PLASMA PRODUCTION
Title (en)
SURFACE-WAVE APPLICATOR AND METHOD FOR PLASMA PRODUCTION
Title (de)
OBERFLÄCHENWELLENAPPLIKATOR UND VERFAHREN ZUR PLASMAERZEUGUNG
Title (fr)
APPLICATEUR D'ONDE DE SURFACE ET PROCÉDÉ POUR LA PRODUCTION DE PLASMA
Publication
Application
Priority
- FR 1256673 A 20120711
- EP 2013064578 W 20130710
Abstract (en)
[origin: WO2014009412A1] The invention relates to a surface-wave applicator (1) for plasma production, comprising: an electrically conductive coaxial assembly (2) formed by a central core (20) and an outer tubular conductor (21) surrounding the central core (20) and separated from same by an annular space (22) allowing propagation of an electromagnetic wave (W); and a dielectric tube (3) inserted, at the end of the coaxial assembly (2), into the annular electromagnetic wave propagation space (22) and extending beyond the output plane (Y) of the applicator by a length at least twice the outside diameter of the tube (3), such that an electromagnetic wave (W) being propagated in the coaxial assembly (2) is introduced into the section of the dielectric tube (3) along the longitudinal direction (X) of the tube (3) in order to produce a surface-wave plasma along the portion of the dielectric tube in which the inner wall (30) and/or the outer wall (31) is in contact with a plasma gas (4).
IPC 8 full level
H05H 1/46 (2006.01)
CPC (source: EP)
H05H 1/46 (2013.01); H05H 1/4615 (2021.05)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2014009412 A1 20140116; CN 104782235 A 20150715; CN 104782235 B 20170308; EP 2873307 A1 20150520; EP 2873307 B1 20160706; FR 2993428 A1 20140117; FR 2993428 B1 20140808; JP 2015530694 A 20151015; JP 6263175 B2 20180117
DOCDB simple family (application)
EP 2013064578 W 20130710; CN 201380036340 A 20130710; EP 13735272 A 20130710; FR 1256673 A 20120711; JP 2015520974 A 20130710